Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface

Abstract

This article reports on the first demonstration of a high resolution (∼1.9 nW/Hz 1/2 measured in 200 Hz bandwidth) and fast (∼5.3 ms) uncooled Infrared (IR) detector based on a high frequency (172 MHz) aluminum nitride nano-plate piezoelectric fishnet-like metasurface (PFM). For the first time, an ultrathin (650 nm) piezoelectric fishnet-like metasurface is employed to form the vibrating body of a nanoelectromechanical resonator with a unique combination of optical, thermal and electromechanical properties. Sensing and actuation of a high frequency and high electromechanical performance (quality factor, Q ∼2254 and electromechanical coupling coefficient, k 2 t ∼1.4%) bulk acoustic mode of vibration in the free-standing ultrathin structure is achieved thanks to the superior piezoelectric transduction properties of the proposed metasurface. Strong absorption (60%) of mid wavelength infrared (MWIR) radiation in the ultra-low volume resonant device is obtained thanks to the properly engineered optical properties of the fishnet-like metasurface which provide multiple plasmonic resonances at 3-5 µm to the structure. The demonstrated resonant PFM detector technology marks a milestone towards the implementation of a new class of high performance, miniaturized and low power MWIR imaging systems.

Terahertz communication: detection and signal processing

“…By separating the sensitive and vibrating elements into two parts, signal conversion can be effectively enhanced. In recent years, AlN [100], LiNbO3 [101], metal [99], quartz [102], and SiN [103] have received widespread attention as IR absorption and vibrating elements because of their high IR absorption rates and high sensitivities in terms of the temperature change. In addition to common IR-sensitive materials, Qian et al [104] added a layer of ultrathin graphene on AlN, as shown in figure 7, which not only shows a resonant frequency of 307 MHz and quality factor of 450% of the original but also significantly improves the IR absorption rate based on the subwavelength thickness of the transparent graphene film, increasing it by ten times at 5 µm and possibly a hundred times at 3.4 µm.…”

Modulation of optical absorption and electrical properties in Mn-Co-Ni-O-based high-entropy thin films

“…Improving the sensitivity of IR detectors often involves enhancing the absorption of IR light by the detector material (Hui et al, 2021). While this can be achieved by adding additional absorbing layers, there has been considerable interest in IR detectors made from self-absorbing thin-film materials due to their rapid response (Adiyan et al, 2019).…”

Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators

“…The same detector concept has been presented with graphene trampolines in the visible regime of the electromagnetic spectrum [16]. Other micro-and nanoelectromechanical (MEMS and NEMS) thermal detector concepts include piezoelectric resonators [17]- [19], torsional paddle resonators [20], [21], and polymer resonators [22].…”