Understanding electromigration failure behaviors of narrow cobalt lines and the mechanism of reliability enhancement for extremely dilute alloying of manganese oxide

Fang, Jau-Shiung; Chen, Giin-Shan; Chang, Chin-Chia; Hsiao, Chien-Nan; Chen, Wei-Chun; Cheng, Yi-Lung

doi:10.1016/j.jallcom.2023.172591

Journal of Alloys and Compounds

2024

DOI: 10.1016/j.jallcom.2023.172591

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Understanding electromigration failure behaviors of narrow cobalt lines and the mechanism of reliability enhancement for extremely dilute alloying of manganese oxide

Jau-Shiung Fang,

Giin-Shan Chen,

Chin-Chia Chang

et al.

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Cited by 2 publications

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Understanding electromigration failure behaviors of narrow cobalt lines and the mechanism of reliability enhancement for extremely dilute alloying of manganese oxide

Cited by 2 publications

References 58 publications

The impact of titanium alloying on altering nanomechanical properties and grain structures of sputter-deposited cobalt for electromigration reliability enhancement

The impact of titanium alloying on altering nanomechanical properties and grain structures of sputter-deposited cobalt for electromigration reliability enhancement

Synergistic enhancement of adhesion and electromigration reliability of cobalt via super-diluted (0.06 at.%) tungsten alloying as next-generation interconnect materials

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