Understanding the influence of surface chemical states on the dielectric tunability of sputtered Ba0.5Sr0.5TiO3thin films

Saravanan, K.; Raju, K. C. James

doi:10.1088/2053-1591/1/1/015706

Mater. Res. Express

2014

DOI: 10.1088/2053-1591/1/1/015706

|View full text |Cite

Understanding the influence of surface chemical states on the dielectric tunability of sputtered Ba_0.5Sr_0.5TiO₃thin films

K. Saravanan¹,

K. C. James Raju²

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2015

2024

Publication Types

Select...

Article3

Relationship

Self Cite0

Independent3

Authors

Journals

Cited by 3 publications

References 63 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition

et al. 2015

View full text Add to dashboard Cite

Barium strontium titanate (BST, Ba 1−x Sr x TiO 3) thin films have been extensively used in many dielectric devices such as dynamic random access memories (DRAMs). To optimize its characteristics, a microstructural control is essential. In this paper, Ba 0.6 Sr 0.4 TiO 3 thin film has been deposited on the SiO 2 /Si substrate by the pulsed laser deposition (PLD) technique at three different oxygen working pressures of 100, 220 and 350 mTorr. Then the deposited thin films at 100 mTorr oxygen pressure were annealed for 50 min in oxygen ambient at three different temperatures: 650, 720 and 800 • C. The effect of oxygen working pressure during laser ablation and thermal treatment on the films was investigated by using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) analysis methods. X-ray photoelectron spectroscopy analysis was used to determine the surface chemical composition of the samples. The results indicate that the deposited BST film at low working pressure (100 mTorr) in PLD chamber shows a lower surface roughness than other working pressures (220 and 350 mTorr). The as-deposited films show an amorphous structure and would turn into polycrystalline structure at annealing temperature above 650 • C. Increase of temperature would cause the formation of cubic and perovskite phases, improvement in crystalline peaks and also result in the decomposition of BST at high temperature (above 800 • C). In addition, rising of temperature leads to the increase in size of grains and clusters. Therefore more roughness was found at higher temperatures as a result of a more heterogeneous growth and less tensions.

show abstract

Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition

et al. 2015

View full text Add to dashboard Cite

show abstract

Influence of oxygen pressure during deposition on the microwave dielectric tunability of Ba0.5Sr0.5TiO3 thin films in PLD process

Akhil Raman,

Arun,

Shivakumar

et al. 2024

Applied Surface Science

View full text Add to dashboard Cite

High energy photon induced Fermi-level shift of Ba 0.5 Sr 0.5 TiO 3 thin films

2017

View full text Add to dashboard Cite

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Understanding the influence of surface chemical states on the dielectric tunability of sputtered Ba_0.5Sr_0.5TiO₃thin films

Cited by 3 publications

References 63 publications

Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition

Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition

Influence of oxygen pressure during deposition on the microwave dielectric tunability of Ba0.5Sr0.5TiO3 thin films in PLD process

High energy photon induced Fermi-level shift of Ba 0.5 Sr 0.5 TiO 3 thin films

Contact Info

Product

Resources

About