2013
DOI: 10.7567/apex.6.115503
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Uniform Low-to-High In Composition InGaN Layers Grown on Si

Abstract: Uniform, compact, and thick InGaN layers are grown on Si(111) substrates by plasma-assisted molecular beam epitaxy without any buffer layers at low temperatures of around 320 C. By adjusting the Ga/In flux ratio, InGaN layers with In compositions between 10 and 33% are obtained, providing emission covering the whole visible spectral range. The In composition varies less than 2% over large areas, and the singlecrystalline hexagonal InGaN layers have a well-defined epitaxial relationship with the Si substrate. P… Show more

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Cited by 16 publications
(11 citation statements)
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“…InGaN can be grown directly also on Si, as already demonstrated in [42]. Further, the InGaNfilms or QDs strain, as in all WZ semiconductors, induce a piezoelectric polarization, as well.…”
Section: Physical Parameters Gan Inn Bowing Parametersmentioning
confidence: 82%
“…InGaN can be grown directly also on Si, as already demonstrated in [42]. Further, the InGaNfilms or QDs strain, as in all WZ semiconductors, induce a piezoelectric polarization, as well.…”
Section: Physical Parameters Gan Inn Bowing Parametersmentioning
confidence: 82%
“…Hence, the direct growth on Si substrates is the ultimate goal, allowing for device designs such as InGaN/Si tandem solar cells and vertical contact schemes at much lower cost and for the direct integration with existing Si technology. Along this line, we have already reported the growth of thick and uniform high-In-content InGaN layers on Si by either strongly promoting growth selectivity (the separation of low-and high-In-content regions) producing micron-sized atomically flat In-rich regions 15 or by the suppression of growth selectivity at lower temperature resulting in undulated, chemically uniform InGaN layers 16 with high optical quality.…”
Section: à2mentioning
confidence: 84%
“…The In content was determined using Vegard's law by linear interpolation between the peak positions of GaN and InN. Full reciprocal space mapping has shown complete relaxation of the InGaN layers 23 . To clearly resolve the InN QDs, AFM images are shown in Fig.…”
Section: Resultsmentioning
confidence: 99%