Universal correction procedure for electron-probe microanalysis. I. Measurement of X-ray depth distributions in solids

Sewell, D A; Love, G.; Scott, V. D.

doi:10.1088/0022-3727/18/7/010

Cited by 56 publications

(9 citation statements)

References 3 publications

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“…The SEM-EDS spectra were fitted using the Oxford Instruments Link code 37,38,39 which is based on a semi-empirical general determination of the depth distribution of the X-ray excitation function due to the collision cascade of the electron beam, utilising both Monte Carlo calculations and an extensive series of measurements of tracer layers of one material in another together with self-supporting thin layers. The accuracy with which this function is estimated depends on the uncertainty in the tracer layer thicknesses (3%) and the demonstrable accuracy of the MC (also about 3%).…”

Section: Discussionmentioning

confidence: 99%

Accurate determination of the Ca:P ratio in rough hydroxyapatite samples by SEM‐EDS, PIXE and RBS—a comparative study

et al. 2009

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The Ca:P ratio in a certified standard of hydroxyapatite was determined by Xray spectrometry (XRS), with the X-rays excited by both electrons and ions using energy dispersive spectroscopy on the scanning electron microscope (SEM-EDS) and particle induced X-ray emission (PIXE). The certified value of Ca:P was accurately verified by 3 MeV 4 He + Rutherford Backscattering Spectrometry (RBS).We show that the demonstrably rough surface of this sample does not cause perturbation of the Ca:P ratio within the uncertainties of each of the XRS measurements. Paper O4-8, EXRS

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Section: Discussionmentioning

confidence: 99%

Accurate determination of the Ca:P ratio in rough hydroxyapatite samples by SEM‐EDS, PIXE and RBS—a comparative study

et al. 2009

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“…Same as Fig. 3 but on the Sewell's data base [34] [30] Bastin [30] Bastin [30] Bastin [30] a,b,c The results were taken from [5], [10], [15] respectively. …”

Section: Medium To Heavy Element Analyses (Z > 10)mentioning

confidence: 99%

An accurate computer correction program for quantitative electron probe microanalysis

1994

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Abstract. The aim of this paper is to present a practical and accurate program of correction based on a new mathematical description of q~(pz), which allows a global correction combining atomic number and absorption correction [ZA]. Key words: EPMA, computer program, correction procedure, X-ray depth distribution.Electron probe microanalysis (EPMA) requires several corrections to quantify a specimen. These corrections allow to convert the measured intensity of the characteristic X-ray into elemental concentration. The measured intensity I~ emitted from element A in a homogeneous sample is expressed (in the absence of significant fluorescence effects) by: I~ = cst " C A J o tb e(PZ) " exp(--ZePZ) dpz ,where Ca is the weight fraction of element A, pz is the mass depth in the sample,

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“…Love et al 34 and Sewell et al 35 proposed a simple algorithm based on the assumption of constant step length. The electron range was divided into 100 identical linear steps.…”

Section: Theorymentioning

confidence: 99%

“…U \ E/E c , E c Despite these drastic simpliÐcations of the theoretical model, the calculated /(oz) functions compared well with experiment. 34,35 A more advanced theoretical model has been developed by Kotera et al 25 and Murata et al26 to determine the /(oz) function at kilovolt energies. The partial wave expansion method was used to calculate the elastic scattering events, and di †erent modiÐcations of the Bethe equation were made to describe the energy loss.…”

Section: Theorymentioning

confidence: 99%

The Excitation Depth Distribution Function for Auger Electrons Created by Electron Impact

Jabłoński

Tougaard²

1997

Surf. Interface Anal.

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A theoretical Monte Carlo model for calculations of the excitation depth distribution function (EDDF) deÐning the distribution of ionizations caused by impact of medium energy electrons has been developed. Within this model, the energy losses are described by the Universal cross-section, which has successfully been applied for peak shape analysis at medium energies. Furthermore, the proposed model accounts for the energy dependence of the di †erential elastic scattering cross-sections, which may be very pronounced at medium energies. It has been found that the mean range of subshell ionizations in iron at 1250 eV extends only down to ¿40 This result conÐrms an L 3 Ó. experimental value found recently from analysis of the Fe spectral shape. Very good agreement is also L 3 MM observed between experimental and theoretical mean ionization depths obtained at higher energies. The shape of the EDDF closely resembles the shape of the /(qz) function used in the formalism of electron probe microanalysis. Similarly with the /(qz) function, the EDDF initially increases with depth to reach a maximum and then monotonically decays. The EDDF resulting from the present theoretical model has been compared with the /(qz) function derived from the experimental data acquired at much higher energies (BASTIN 86 algorithm). Unexpectedly, this simple formula was in reasonably good agreement with the present calculations in the energy range 1250-4000 eV and for a wide range of atomic numbers. It is concluded that the BASTIN 86 algorithm is a reasonable approximation of the EDDF function for AES.

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Universal correction procedure for electron-probe microanalysis. I. Measurement of X-ray depth distributions in solids

Cited by 56 publications

References 3 publications

Accurate determination of the Ca:P ratio in rough hydroxyapatite samples by SEM‐EDS, PIXE and RBS—a comparative study

Accurate determination of the Ca:P ratio in rough hydroxyapatite samples by SEM‐EDS, PIXE and RBS—a comparative study

An accurate computer correction program for quantitative electron probe microanalysis

The Excitation Depth Distribution Function for Auger Electrons Created by Electron Impact

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