2018
DOI: 10.1088/2053-1583/aaf59c
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Unveiling the competitive role of etching in graphene growth during chemical vapor deposition

Abstract: During the growth of graphene via chemical vapor deposition, its recessive process, that is, etching, is often neglected. However, recent experimental studies showed that etching is not only able to give rise to complex morphologies that cannot be achieved by pure growth, but it also can be used to create designed patterns. In this work, we develop a kinetic Monte Carlo model based on the underlying mechanisms and growth kinetics of graphene to predict the formation of various morphologies during growth and et… Show more

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Cited by 12 publications
(17 citation statements)
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“…89 The phenomena were also reported in metal oxides, such as CdO, 90 ZnO, 91 and CeO2, 92 in which the plasmon mode can couple with multiple LO phonon modes and even the surface phonon modes. With the recent discovery on the chiral phonon and its associated angular momentum, [93][94] the plasmon-phonon coupling could have more profound impact in the next generation electronic devices.…”
Section: Plasmon-phonon Interactionmentioning
confidence: 99%
“…89 The phenomena were also reported in metal oxides, such as CdO, 90 ZnO, 91 and CeO2, 92 in which the plasmon mode can couple with multiple LO phonon modes and even the surface phonon modes. With the recent discovery on the chiral phonon and its associated angular momentum, [93][94] the plasmon-phonon coupling could have more profound impact in the next generation electronic devices.…”
Section: Plasmon-phonon Interactionmentioning
confidence: 99%
“…Additives, such as N 2 , does not affect the shape of graphene flakes [29]. By introducing etching process on their rate catalog, Chen et al [30,31] predicted dodecagon with a hexagonal hole, double hexagonal rings, honeycomb-like networks and nanoribbons. In a recent work [32], they studied graphene growth on Cu (1 1 1) as a function of deposition flux and temperature.…”
Section: Chemical Vapor Depositionmentioning
confidence: 99%
“…However, the edge structure and morphology of graphene are mainly regulated by the dynamics of growth rather than by the initial nucleation stage. The kinetic factor mentioned here specifically refers to the adsorption and diffusion rates of the carbon material on the substrate surface and the edge of the nucleation point during the growth process of graphene, and the final structural morphology of graphene is jointly determined by the mutual influence of these two rates [11][12][13].…”
Section: Introductionmentioning
confidence: 99%