1994
DOI: 10.1063/1.1144563
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Use of capacitance diaphragm gauges at pressures down to 10−6 Torr

Abstract: The useful range of a capacitance diaphragm gauge is extended down to 1×10−6 Torr with an uncertainty of ±10−7 Torr using computer-based averaging. Gauge linearity is measured by observing the deflection of the diaphragm by the force of gravity. Precise pressure increments are generated by tilting the gauge through a range of accurately measured angles. By this procedure the gauge is observed to be linear to within ±1% plus 10−7 Torr between 1×10−6 and 8×10−3 Torr. Additionally, the deflection of the center of… Show more

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Cited by 18 publications
(4 citation statements)
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“…However, the translational symmetry of the apparatus along the electron-beam axis ensures that for every ion produced in the region directly above the PSD that escapes detection, one from outside this region will be detected. The target number density n is obtained from measurements of the gas pressure using a capacitance diaphragm gauge (Straub et al 1994). The CF 4 used in this work was obtained from Matheson Gas Products and has a specified purity of better than 99.9%.…”
Section: Apparatus and Experimental Methodsmentioning
confidence: 99%
“…However, the translational symmetry of the apparatus along the electron-beam axis ensures that for every ion produced in the region directly above the PSD that escapes detection, one from outside this region will be detected. The target number density n is obtained from measurements of the gas pressure using a capacitance diaphragm gauge (Straub et al 1994). The CF 4 used in this work was obtained from Matheson Gas Products and has a specified purity of better than 99.9%.…”
Section: Apparatus and Experimental Methodsmentioning
confidence: 99%
“…The target number density n is obtained from measurements of the gas pressure using a capacitance diaphragm gauge. 9 The NO used in this work was obtained from the Aeriform Corporation and has a minimum specified purity of 98.5%. NO 2 was obtained from Matheson Gas Products and has a specified purity of 99.5%.…”
Section: Apparatus and Experimental Methodsmentioning
confidence: 99%
“…However, the translational symmetry of the apparatus along the electron-beam axis ensures that for every ion produced in the region directly above the PSD that escapes detection, one from outside this region will be detected. The target number density n is obtained from measurements of the gas pressure using a capacitance diaphragm gauge (Straub et al 1994).…”
Section: Apparatus and Experimental Methodsmentioning
confidence: 99%