Use of High Repetition Rate and High Power Lasers in Microfabrication: How to Keep the Efficiency High?

Račiukaitis, Gediminas; Brikas, Marijus; Gečys, Paulius; Voisiat, Bogdan; Gedvilas, Mindaugas

doi:10.2961/jlmn.2009.03.0008

Cited by 160 publications

(90 citation statements)

References 3 publications

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“…Similar calculations have been done for a Gaussian shaped beam as emitted by most ultra short pulsed systems (Neuenschwander et al (2012), Neuenschwander et al (2010, Raciukaitis et al (2009)). Again a maximum removal rate per average power (ablation efficiency) is observed:…”

Section: Ablationmentioning

confidence: 85%

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Influence of the Pulse Duration onto the Material Removal Rate and Machining Quality for Different Types of Steel

Lauer

Jäggi²,

Neuenschwander³

2014

Physics Procedia

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When high requirements concerning machining quality are demanded, ultra short pulsed lasers with pulse durations from a few 100fs to 10ps may be the tool of choice. For these pulses it is known that the removal rate and machining quality slightly increases with shorter pulse duration. But as cost-effectiveness is also a key factor for a successful transfer of a technology to industrial applications, these systems compete against more cost effective systems with pulse durations from several 10ps to a few ns. It was found in previous work that the removal rate for metals strongly depends on the pulse duration. For steel also the composition and microstructure will influence the ablation processes. A systematic study of the removal rate and the machining quality for different types of steel and for pulse durations of several 100 fs to few ns will be presented.

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Section: Ablationmentioning

confidence: 85%

“…It has to be pointed out that the maximum value of the removal rate (5) is only obtained at this optimum point. A general expression for the removal rate of a Gaussian beam is also developed by Neuenschwander et al (2010) and Raciukaitis et al (2009) and reads: …”

Section: Ablationmentioning

confidence: 99%

Influence of the Pulse Duration onto the Material Removal Rate and Machining Quality for Different Types of Steel

Lauer

Jäggi²,

Neuenschwander³

2014

Physics Procedia

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“…It is evident from the plot that this type of laser machining has the maximum around the boundary of gentle and strong ablation regimes, which corresponds to experimental peak fluence values ranging from 6.4 to 16.3 J/cm 2 . In comparison with similar picosecond machining [17,23], higher efficiency values are obtained, although at higher peak fluence. This in turn means that there is a possibility to have high machining resolution and at the same time retain performance.…”

Section: Resultsmentioning

confidence: 76%

Experimental study on femtosecond laser micromachining of grooves in stainless steel

Kuršelis¹,

Kudrius²,

Paipulas³

et al. 2010

Lithuanian J. Phys.

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Laser micromachining of grooves having rectangular profile in stainless steel with high repetition rate femtosecond pulses was investigated. Wide range of process parameters, such as peak fluence (0.15-133 J/cm 2 ), pulse repetition rate (10-223 kHz), cumulative exposure dose, and liquid-assisted method for improving both machining efficiency and resultant structure quality was considered in order to provide understanding of underlying physical capabilities and limitations. Thereby the presence of optimal regimes for obtaining respectively maximum pulse energy utilization and maximum machining performance is proved. Logarithmic law of ablation rate for 400 fs laser pulses centred at 1030 nm with repetition rate of 25 kHz is confirmed for this type of machining.

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“…The highest ablation efficiency for ultrashort laser pulses was indicated for laser fluences about 7.4 times above the ablation threshold. 16 Within the presented investigations performed with a picosecond laser system, the supplied fluence at the highest material removal rate exceeds the threshold fluence by a factor of 4. So it can be assumed that the material removal rate can be maximized by irradiating laser pulses with a laser fluence in the range of 0.8 J/cm 2 .…”

Section: Resultsmentioning

confidence: 90%

High-rate laser microprocessing using a polygon scanner system

Loeschner

Schille

Streek

et al. 2015

Journal of Laser Applications

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This paper discusses results obtained in high-rate laser microprocessing by using a high average power high-pulse repetition frequency ultrashort pulse laser source in combination with an in-house developed polygon scanner system. With the recent development of ultrashort pulse laser systems supplying high average power of hundreds watts and megahertz pulse repetition rates, a significant increase of the productivity can potentially be achieved in micromachining. This permits upscaling of the ablation rates and large-area processing, gaining increased interest of the ultrashort pulse laser technology for a large variety of industrial processes. However, effective implementation of high average power lasers in microprocessing requires fast deflection of the laser beam. For this, high-rate laser processing by using polygon scanner systems provide a sustainable technological solution. In this study, a picosecond laser system with a maximum average power of 100 W and a repetition rate up to 20 MHz was used. In raster scanning using the polygon scanner, the laser beam with a focus spot diameter of 44 μm was deflected with scan speeds of several hundred meters per second. The two-dimensional scanning capability of the polygon scanner supplied a scan field of 325 × 325 mm. The investigations were focused on high-rate large-area laser ablation of technical grade stainless steel as well as selective thin film ablation from bulk substrates. By variation of the processing parameters laser fluence, as well as temporal and spatial pulse-to-pulse distance, their impact onto the ablation process was evaluated with respect to the ablation rate, processing rate, surface quality, and ablation efficiency.

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Use of High Repetition Rate and High Power Lasers in Microfabrication: How to Keep the Efficiency High?

Cited by 160 publications

References 3 publications

Influence of the Pulse Duration onto the Material Removal Rate and Machining Quality for Different Types of Steel

Influence of the Pulse Duration onto the Material Removal Rate and Machining Quality for Different Types of Steel

Experimental study on femtosecond laser micromachining of grooves in stainless steel

High-rate laser microprocessing using a polygon scanner system

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