2016
DOI: 10.1109/jmems.2016.2564499
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Use of Self-Calibration Data for Multifunctional MEMS Sensor Prognostics

Abstract: This paper proposes a solution to monitor the degradation of a multifunctional MEMS sensor (MFS) and to recalibrate the sensor output accordingly. The solution is able to predict the remaining useful life based on the recalibration history. The MFS used is a dual pressure-humidity hybrid sensor where model data has been used to demonstrate the applicability and the performance of the proposed method for diagnosis, self-correction and prognosis.

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Cited by 3 publications
(1 citation statement)
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“…For BIST, cross-sensitivity can be exploited as a substitute for redundancy. Extensive research has been carried out in the field of multi-functional sensors (MFS) at Lancaster University by Richardson et al, an example of which is provided in Figure 22 [ 93 , 94 , 95 ].…”
Section: Bist Methods Building On Multi-functional Sensorsmentioning
confidence: 99%
“…For BIST, cross-sensitivity can be exploited as a substitute for redundancy. Extensive research has been carried out in the field of multi-functional sensors (MFS) at Lancaster University by Richardson et al, an example of which is provided in Figure 22 [ 93 , 94 , 95 ].…”
Section: Bist Methods Building On Multi-functional Sensorsmentioning
confidence: 99%