Abstract. Hydrogen and nitrogen containing discharges emit intense radiation in a broad wavelength region in the VUV. The measured radiant power of individual molecular transitions and atomic lines between 117 nm and 280 nm are compared to those obtained in the visible spectral range and moreover to the RF power supplied to the ICP discharge. In hydrogen plasmas driven at 540 W of RF power up to 110 W are radiated in the VUV, whereas less than 2 W is emitted in the VIS. In nitrogen plasmas the power level of about 25 W is emitted both in the VUV and in the VIS. In hydrogen-nitrogen mixtures, the NH radiation increases the VUV amount. The analysis of molecular and atomic hydrogen emission supported by a collisional radiative model allowed determining plasma parameters and particle densities and thus particle fluxes. A comparison of the fluxes showed that the photon fluxes determined from the measured emission are similar to the ion fluxes, whereas the atomic hydrogen fluxes are by far dominant. Photon fluxes up to 510 20 m -2 s -1 are obtained, demonstrating that the VUV radiation should not be neglected in surface modifications processes, whereas the radiant power converted to VUV photons is to be considered in power balances. Varying the admixture of nitrogen to hydrogen offers a possibility to tune photon fluxes in the respective wavelength intervals.