2011 IEEE Nanotechnology Materials and Devices Conference 2011
DOI: 10.1109/nmdc.2011.6155377
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UV-enhanced photodetector with nanocrystalline-TiO<inf>2</inf> thin film via CMOS compatible process

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Cited by 3 publications
(2 citation statements)
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“…UV sensors are widely used in different applications, such as pollution monitoring, flame sensing, early missile plume detection, and other advanced military applications [6]. Different types of Si-based photodetectors are already available in the market and are very sensitive with low noise and quick response [5].…”
Section: Introductionmentioning
confidence: 99%
“…UV sensors are widely used in different applications, such as pollution monitoring, flame sensing, early missile plume detection, and other advanced military applications [6]. Different types of Si-based photodetectors are already available in the market and are very sensitive with low noise and quick response [5].…”
Section: Introductionmentioning
confidence: 99%
“…As for photocurrent, thicker film means better light absorption efficiency, which improves the photo response [36]. Another reason is that thicker film produces larger grain size and therefore higher carrier mobility [37]. However, higher mobility causes dark current to be higher as well.…”
Section: Responsivitymentioning
confidence: 99%