UV Hyperspectral Imaging as Process Analytical Tool for the Characterization of Oxide Layers and Copper States on Direct Bonded Copper

Abstract

Hyperspectral imaging and reflectance spectroscopy in the range from 200–380 nm were used to rapidly detect and characterize copper oxidation states and their layer thicknesses on direct bonded copper in a non-destructive way. Single-point UV reflectance spectroscopy, as a well-established method, was utilized to compare the quality of the hyperspectral imaging results. For the laterally resolved measurements of the copper surfaces an UV hyperspectral imaging setup based on a pushbroom imager was used. Six different types of direct bonded copper were studied. Each type had a different oxide layer thickness and was analyzed by depth profiling using X-ray photoelectron spectroscopy. In total, 28 samples were measured to develop multivariate models to characterize and predict the oxide layer thicknesses. The principal component analysis models (PCA) enabled a general differentiation between the sample types on the first two PCs with 100.0% and 96% explained variance for UV spectroscopy and hyperspectral imaging, respectively. Partial least squares regression (PLS-R) models showed reliable performance with R2c = 0.94 and 0.94 and RMSEC = 1.64 nm and 1.76 nm, respectively. The developed in-line prototype system combined with multivariate data modeling shows high potential for further development of this technique towards real large-scale processes.

Recent innovations in the technology and applications of low-dimensional CuO nanostructures for sensing, energy and catalysis

“…The origin of their unique properties can be found in their extremely high surface-to-volume ratios and the way in which they interact with particular crystal faces. Applications cover a broad range of fields, such as in the sensing of various gases, 26–28 benzyl alcohol, 29 ethanol, 30 hydrogen, 31 glucose, 32,33 hydrogen sulphide, 34 and many other chemicals, as well as in catalysis 35 and photocatalysis, 36–38 batteries, 39,40 optoelectronics, 41 field emission, 42 supercapacitor applications, 43–45 broadband visible-light-driven surface-enhanced Raman scattering, 46,47 and others. 48–50…”

“…The origin of their unique properties can be found in their extremely high surface-to-volume ratios and the way in which they interact with particular crystal faces. Applications cover a broad range of fields, such as in the sensing of various gases, [26][27][28] benzyl alcohol, 29 ethanol, 30 hydrogen, 31 glucose, 32,33 hydrogen sulphide, 34 and many other chemicals, as well as in catalysis 35 and photocatalysis, [36][37][38] batteries, 39,40 optoelectronics, 41 field emission, 42 supercapacitor applications, [43][44][45] broadband visible-light-driven surface-enhanced Raman scattering, 46,47 and others. [48][49][50] The role of CuO low-dimensional nanomaterials Similar to many other metal oxide nanostructures, forests of CuO nanowires demonstrate advanced properties that are particularly needed for many applications such as devices for field emission applications, 51 batteries, 52 supercapacitors, 53,54 and others.…”

Quantitative detection of corrosion minerals in carbon steel using shortwave infrared hyperspectral imaging

“…Antony et al 22 used a HSI with a fibre bundle probe attached to detect corrosion on steel samples. Al Ktash et al 23 proposed a solution using UV HSI to characterise oxide layers on copper.…”

Prediction of Honeydew Contaminations on Cotton Samples by In-Line UV Hyperspectral Imaging

“…Hyperspectral imaging and spectroscopic applications are widely used in industrial environments [ 5 , 6 , 7 , 8 , 9 , 10 ]. The importance of hyperspectral imaging is steadily growing in the textile industry.…”

“…The rarely used UV region showed interesting results despite the illumination not being optimal. Previously, our group reported a hyperspectral imaging setup for the UV spectral region, where this setup was used to distinguish between different pharmaceutical drugs [ 5 ], as well as for characterizing the oxide layers’ thickness and copper states on direct bonded copper [ 6 ]. The results clearly showed that a spectral imager based on pushbroom technology has many advantages in terms of achieving short UV operational wavelengths and a high spectral resolution.…”