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Thyen, R.; Höpfner, Kartin; Kläke, Niklas; Klages, Claus‐Peter

doi:10.1023/a:1009535932312

Cited by 24 publications

(18 citation statements)

References 3 publications

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“…Other well-known fields of application are the cleaning of metallic surfaces (decontamination) and their sterilization [57][58][59][60], as well as the ashing of organic compounds, see e.g. [61].…”

Section: Fields Of Applicationmentioning

confidence: 99%

The barrier discharge: basic properties and applications to surface treatment

Wagner

Brandenburg

Kozlov

et al. 2003

Vacuum

681

474

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Barrier discharges (BDs) produce highly non-equilibrium plasmas in a controllable way at atmospheric pressure, and at moderate gas temperature. They provide the effective generation of atoms, radicals and excited species by energetic electrons. In the case of operation in noble gases (or noble gas/halogen gas mixtures), they are sources of an intensive UV and VUV excimer radiation. There are two different modes of BDs. Generally they are operated in the filamentary one. Under special conditions, a diffuse mode can be generated. Their physical properties are discussed, and the main electric parameters, necessary for the controlled BD operation, are listed. Recent results on spatially and temporally resolved spectroscopic investigations by cross-correlation technique are presented. BDs are applied for a long time in the wide field of plasma treatment and layer deposition. An overview on these applications is given. Selected representative examples are outlined in more detail. In particular, the surface treatment by filamentary and diffuse BDs, and the VUV catalyzed deposition of metallic layers are discussed. BDs have a great flexibility with respect to their geometrical shape, working gas mixture and operation parameters. Generally, the scaling-up to large dimensions is of no problem. The possibility to treat or coat surfaces at low gas temperature and pressures close to atmospheric once is an important advantage for their application.

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Section: Fields Of Applicationmentioning

confidence: 99%

The barrier discharge: basic properties and applications to surface treatment

Wagner

Brandenburg

Kozlov

et al. 2003

Vacuum

681

474

View full text Add to dashboard Cite

show abstract

“…Thus, the SBD appears to be a promising system for surface engineering at atmospheric pressure. Note that the SBD has been already used successfully in several application such as protective hydrophobic thin film deposition [2], surface modification [3] and it can be used for surface cleaning of materials [4].…”

Section: Introductionmentioning

confidence: 99%

Excitation of XeCl and KrCl excimer molecules by surface barrier discharge

et al. 2004

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“…As surface treatments, the activation of plastics,4, 7 the removal of oxide and sulfide layers from metals,4 as well as the deposition of hydrocarbon‐containing layers on surfaces8, 9 are the most important fields of DBD application. On the other hand, coating of surfaces with thin films from silicon–organic monomer precursors is also possible 10–13.…”

Section: Introductionmentioning

confidence: 99%

“…The importance of plasma–surface reactions is also taken into consideration by Thyen et al20 and Klages and Eichler 9. In these investigations the feasibility of cleaning of surfaces, which are contaminated with hydrocarbons, by the use of atmospheric pressure plasmas is described.…”

Section: Introductionmentioning

confidence: 99%

Diagnostics of SiO_x‐Containing Layers Deposited on Powder Particles by Dielectric Barrier Discharge

Hähnel

Brüser

Kersten

2007

Plasma Processes & Polymers

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We report on the analysis of the composition and internal structure of SiOx layers deposited on powder particles by using HMDSO as monomer, different oxygen admixtures in argon, and a dielectric barrier surface discharge under atmospheric pressure. Composition and structure of the deposited layers with special regard to silicon, carbon, and hydrocarbon bonding were studied by FTIR and XPS measurements and compared with previous investigations from the literature. For correlation of the layer composition and the plasma gas phase we used mass spectrometric analysis of the exhaust gas. The stoichiometric ratios of the deposited layers are remarkably influenced by the Ar/O2 ratio and the discharge conditions.

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Untitled

Cited by 24 publications

References 3 publications

The barrier discharge: basic properties and applications to surface treatment

The barrier discharge: basic properties and applications to surface treatment

Excitation of XeCl and KrCl excimer molecules by surface barrier discharge

Diagnostics of SiO_x‐Containing Layers Deposited on Powder Particles by Dielectric Barrier Discharge

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Untitled

Cited by 24 publications

References 3 publications

The barrier discharge: basic properties and applications to surface treatment

The barrier discharge: basic properties and applications to surface treatment

Excitation of XeCl and KrCl excimer molecules by surface barrier discharge

Diagnostics of SiOx‐Containing Layers Deposited on Powder Particles by Dielectric Barrier Discharge

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Product

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Diagnostics of SiO_x‐Containing Layers Deposited on Powder Particles by Dielectric Barrier Discharge