2009
DOI: 10.1016/j.mseb.2008.10.040
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Vacancies and E-centers in silicon as multi-symmetry defects

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Cited by 15 publications
(16 citation statements)
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“…Our results agree with these facts. We also confirm the existence of several metastable structures with the charge other than +2 that have nearly the same energy [24,25,28,29]. The length of the dimer in V 0 1 decreases with the cell size and saturates at about 0.31 nm.…”
Section: Results For Finite Supercellssupporting
confidence: 74%
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“…Our results agree with these facts. We also confirm the existence of several metastable structures with the charge other than +2 that have nearly the same energy [24,25,28,29]. The length of the dimer in V 0 1 decreases with the cell size and saturates at about 0.31 nm.…”
Section: Results For Finite Supercellssupporting
confidence: 74%
“…And it makes an illustrative case of Jahn-Teller distortions [4,15,20,36], being the first proven example of negative Hubbard U [4,15,18,30,37]. It combines with impurities [29], forming complexes like the A center [38] (with O) or the E center [39] (with P), and also with other defects, including other vacancies. Si vacancies and their agglomerates must thus be dealt with in the simulation of various defect-related processes, such as dopant implantation, rapid thermal annealing (RTA), and SiO 2 precipitation.…”
Section: Introductionmentioning
confidence: 99%
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“…For charge state +2, the energy of the T d structure is 0.15 eV lower than the one of D 2d while for the −2 charge state, a split vacancy with D 3d symmetry is 0.2 eV more stable compared to the second lowest energy structure, C 2v . All the ground state structures found for charge states 0, +2 and -2 are in agreement with previous theoretical studies [35][36][37][38]49] and with DLTS and EPR studies of Watkins [40,50]. As Table 1 shows, the main discrepancies between previously published results occur for the defect charge states +1 and -1.…”
Section: Technical Detailssupporting
confidence: 89%
“…Moreover, defects of the same rank can exist in clusters of different shape, which is the manifestation of the multiconfigurational nature of basic point defects in silicon. 46 144118-11 FIG. 14.…”
Section: Methodological Aspectsmentioning
confidence: 99%