Vacuum-Assisted Microfluidic Technique for Fabrication of Guided Wave Devices

Flores, Angel; Song, Su Jung; Baig, Sarfaraz; Wang, M.R.

doi:10.1109/lpt.2008.926022

Cited by 12 publications

(8 citation statements)

References 13 publications

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“…This residual layer on both sides of the waveguide core left by imprinting can result in high radiation loss, preventing the waveguide to be bent into compact structures, such as rings with small radii. Other researchers have spent much effort to solve it, but usually the proposed solutions require expensive imprinting equipment or a specific setup, for example the vacuum-assisted microfluidic technique in [41]. In the past we circumvented this problem by adopting an inverted ridge shape waveguide and obtained a high quality (Q) factor ring resonator [35].…”

Section: B Waveguide Fabrication With Uv-soft Selective Imprint Techmentioning

confidence: 99%

UV-soft Imprinted Tunable Polymer Waveguide Ring Resonator for Microwave Photonic Filtering

Han

Wang

et al. 2014

J. Lightwave Technol.

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A tunable polymer waveguide ring resonator is proposed and demonstrated for microwave photonic filtering. The ring resonator consists of a Mach-Zehnder interferometer (MZI) as the tunable coupler and two micro-heaters as the thermo-optic phase shifters. It was fabricated with inorganic-organic hybrid optical material polysiloxane-liquid series by a novel and simple UV-soft selective imprint technique. The coupling conditions, over-, critical-and under-coupling, were obtained with the microheater on the arm of MZI and the maximum notch depth of about 18 dB was achieved. The resonant wavelength was also tuned with the micro-heater on the ring waveguide. The dispersion induced power fading of radio over fiber link was overcome by the tunable ring resonator with its notch filtering function.Index Terms-Microwave photonics, notch filter, polymer waveguide, ring resonator, tunable coupler, UV-soft imprint.

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Section: B Waveguide Fabrication With Uv-soft Selective Imprint Techmentioning

confidence: 99%

UV-soft Imprinted Tunable Polymer Waveguide Ring Resonator for Microwave Photonic Filtering

Han

Wang

et al. 2014

J. Lightwave Technol.

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“…The synthesized core resin should have the properties of being low enough in viscosity for microfluidic propagation through the PDMS channels, having a higher refractive index than that of the cladding layer, and the capability of curing when exposed to UV light [10]. Using an ellipsometer from Angstrom Sun Technologies, the refractive index of the synthesized core and cladding resins were measured to be 1.5231 and 1.5204 at 633 nm wavelength, respectively.…”

Section: Vam Fabrication Of Polymer Waveguides With 45° Inclined Mirrorsmentioning

confidence: 99%

“…The return light coupling from the surface normal light beam to the waveguide may experience unwanted coupling to the residual polymer planar layer. Vacuum assisted microfluidic (VAM) soft lithography technique has been introduced for array waveguide fabrication to eliminate unwanted residue planer layer associated to µTM fabrication and to improve the sidewall edges [10,11]. In this paper, we present the fabrication of polymer waveguides with 45° inclined mirrors using VAM soft lithographic technique for card-to-backplane optical interconnects.…”

Section: Introductionmentioning

confidence: 99%

Soft lithography fabricated polymer waveguides and 45° inclined mirrors for card-to-backplane optical interconnects

2012

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Polymer waveguides with 45° mirrors are fabricated by vacuum assisted microfluidic (VAM) soft lithographic technique for card-to-backplane optical interconnect applications. Waveguide array structures with inclined surfaces in SU-8 photoresist for PDMS mold are fabricated by prism assisted UV exposure. Sample surface reflected UV light is utilized to eliminate undercut structures and to accomplish the inclined mirror surfaces on both ends of the straight waveguide segments by one-step UV exposure. Polymer waveguides with 45° embedded mirrors demonstrated about 0.49 dB/cm propagation loss and 67% mirror coupling efficiency.

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“…However, the µTM technique also adds a non-uniform 1∼5 µm thick planar layer that results in unwelcome variations of designed optical guiding parameters, while also potentially introducing detrimental WG cross-talks. Elimination of this planar residue layer has recently been documented by us through the use of a vacuum assisted microfluidic (VAM) technique [5,6].…”

Section: Introductionmentioning

confidence: 99%

“…The ability to construct single-mode (SM) polymer waveguides is a key element for the realization of polymer-based optical devices and circuitry [7]. Unfortunately, the previous VAM fabrication of WGs [5,8,9] has dimensional limitations. When the WG cross sectional dimension is larger than 20 × 20 µm, WG lengths of over 30 cm can be easily fabricated.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of single-mode channel polymer waveguides using vacuum assisted microfluidic soft lithography

Baig

Jiang

Sun

et al. 2013

J. Eur. Opt. Soc.-Rapid Publ.

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We report on the fabrication of single-mode channel waveguide structures produced by the vacuum assisted microfluidic soft lithography technique. The soft lithographic technique in conjunction with a specially designed photomask pattern and a synthesized UV curable epoxy resin can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of the microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. Notably, the introduction of sectional flow tapers allows for proper uniform filling of long length small cross-sectional waveguide structures that would ordinarily succumb to clogging at shorter distances during channel filling. The fabricated polymer waveguide was 30 mm in length with a cross section dimension of 7 × 7 µm. The single-mode waveguide propagation was confirmed with beam profiler measurement, and the measured propagation loss for this polymer waveguide was about 0.55 dB/cm.

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Vacuum-Assisted Microfluidic Technique for Fabrication of Guided Wave Devices

Cited by 12 publications

References 13 publications

UV-soft Imprinted Tunable Polymer Waveguide Ring Resonator for Microwave Photonic Filtering

UV-soft Imprinted Tunable Polymer Waveguide Ring Resonator for Microwave Photonic Filtering

Soft lithography fabricated polymer waveguides and 45° inclined mirrors for card-to-backplane optical interconnects

Fabrication of single-mode channel polymer waveguides using vacuum assisted microfluidic soft lithography

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