Handbook of Physical Vapor Deposition (PVD) Processing 1998
DOI: 10.1016/b978-081551422-0.50006-1
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Vacuum Evaporation and Vacuum Deposition

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Cited by 9 publications
(10 citation statements)
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“…From an industrial and production perspective, we have retained deposition methods that are accessible to the research community, the choice of the deposition method strongly relies on the deposited material and the expected optical properties. The main deposition methods used in this study are: thermal evaporation [23], electron-beam evaporation [23][24][25] and magnetron sputtering [26]. The studied materials have been selected according to several parameters such as their optical properties (refractive index n and region of transparency), the availability of the deposition method, the toxicity of the materials, and their cost-effectiveness.…”
Section: Materials and Fabrication Methodsmentioning
confidence: 99%
“…From an industrial and production perspective, we have retained deposition methods that are accessible to the research community, the choice of the deposition method strongly relies on the deposited material and the expected optical properties. The main deposition methods used in this study are: thermal evaporation [23], electron-beam evaporation [23][24][25] and magnetron sputtering [26]. The studied materials have been selected according to several parameters such as their optical properties (refractive index n and region of transparency), the availability of the deposition method, the toxicity of the materials, and their cost-effectiveness.…”
Section: Materials and Fabrication Methodsmentioning
confidence: 99%
“…Readers interested in detailed information about PVD can refer to [30]. Briefly: such process starts with the vaporization of solid metal under vacuum, using high temperature, followed by a rectilinear motion of the vapour atoms in the vacuum chamber and their condensation on the target surface.…”
Section: Discussionmentioning
confidence: 99%
“…In particular, this method is commonly applied to the fabrication of anode materials for LIBs [260,261]. In a vacuum chamber, a solid material is heated to a temperature that produces a vapor pressure sufficient to raise a vapor cloud inside the vacuum chamber [262]. Then, these evaporated particles are free to traverse the chamber and stick to a substrate as a film.…”
Section: Physical Deposition Methodsmentioning
confidence: 99%
“…Two main heating sources-resistive filament and electron beam (e-beam) are widely used for heating the source material. Depending on the temperature required for evaporating the material, resistive filament heating is generally used for the materials with the evaporation temperature below 1500 • C, in contrast to the e-beam heating for the materials with the evaporation temperature above 1500 • C [262].…”
Section: Physical Deposition Methodsmentioning
confidence: 99%