Vacuum Technology
DOI: 10.1007/978-3-540-74433-7_2
|View full text |Cite
|
Sign up to set email alerts
|

Vacuum Pumps

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
4
0

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(4 citation statements)
references
References 151 publications
0
4
0
Order By: Relevance
“…The estimated τ from (5) would match the experimental time constant of 20 000 s derived from the slope of the plot in figure 12 if an average gettering coefficient γ of 0.5 is assumed. At 10 −9 Torr-level pressure the atmosphere is mostly composed of H 2 , CO, H 2 O, CH 4 , and CO, with H 2 the most abundant constituent (~80%) [34], and the gettering coefficient between titanium and different gas species varies between 0.06 (H 2 ) to 0.7 (CO) [35].Therefore, it is reasonable to conclude that the actual gettering coefficient would lie between these two values. The proof-of-concept pump prototype was also characterized with the valve that connects to the external ion pump being closed (figure 13).…”
Section: Resultsmentioning
confidence: 99%
“…The estimated τ from (5) would match the experimental time constant of 20 000 s derived from the slope of the plot in figure 12 if an average gettering coefficient γ of 0.5 is assumed. At 10 −9 Torr-level pressure the atmosphere is mostly composed of H 2 , CO, H 2 O, CH 4 , and CO, with H 2 the most abundant constituent (~80%) [34], and the gettering coefficient between titanium and different gas species varies between 0.06 (H 2 ) to 0.7 (CO) [35].Therefore, it is reasonable to conclude that the actual gettering coefficient would lie between these two values. The proof-of-concept pump prototype was also characterized with the valve that connects to the external ion pump being closed (figure 13).…”
Section: Resultsmentioning
confidence: 99%
“…We would develop and use the microcomputer softwares on putting stress on acquiring of an interesting knowledge and skills of Instrumental Analysis. Our chemical dry lab softwares were previously developed on the purpose of arrangement and reconfirmation of chemistry knowledge [3,4]. However, it is a first practice to have a main target of acquiring of new knowledge for learners.…”
Section: Preparation Of Instrumental Analysis Softwarementioning
confidence: 99%
“…The chemistry curriculum should have the minimum numbers of fundamental lectures and experimental lessons for schooling in Japan [1,2,3,4]. For the purposes of studying chemistry, an indispensable condition is the need for experience gained by doing experiments.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation