Vacuum quality evaluation for uncooled micro bolometer thermal imager sensors

Elßner, Michael

doi:10.1016/j.microrel.2014.07.094

Cited by 14 publications

(7 citation statements)

References 20 publications

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“…Various microdevices, such as microelectromechanical systems (MEMS), require hermetic sealing to protect their mechanical structure from an external environment and to ensure device performance [ 1 , 2 , 3 , 4 ]. After degassing by vacuum annealing, hermetic sealing is performed in a vacuum or inert gas.…”

Section: Introductionmentioning

confidence: 99%

High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps

Kurashima

Motomura

Yanagimachi

et al. 2023

Sensors

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In this study, we design a highly efficient plasma source using a magnetic mirror trap with two opposing permanent magnets for a miniature high-efficiency ion pump. First, we simulated the distribution of the magnetic field line formed by the proposed magnetic mirror configuration. By optimizing the distance between two opposing permanent magnets and size of these magnets, a magnetic mirror ratio value of 27 could be obtained, which is an electron confinement efficiency of over 90%. We also conducted an experiment on a high-efficiency discharge plasma source for a miniature ion pump using an optimized magnetic circuit. As a result, we revealed that the proposed magnetic circuit has a pronounced effect on plasma generation, particularly in the high-vacuum region.

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Section: Introductionmentioning

confidence: 99%

High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps

Kurashima

Motomura

Yanagimachi

et al. 2023

Sensors

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“…For example, high-quality factor mechanical micro-resonators or low heat loss microbolometers can only be obtained in a vacuum better than 10 À3 mbar. 1,2 A general technological trend is to realize such a vacuum encapsulation at the wafer-level at low temperature ( 300 C) by hermetically sealing a cap integrating a small cavity volume in the microliter range or below. To maintain a low internal pressure during the entire lifetime of the device, integration of a non-evaporable getter (NEG) in the cavity is then required.…”

Section: Introductionmentioning

confidence: 99%

“…(1)] (Ref 20). is used to correlate the oblique angle of evaporation (a) and the tilt angle of the nanocolumns (b), both being defined from the substrate normal, as shown inFig.…”

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confidence: 99%

Oblique angle deposition of Au/Ti porous getter films

Moulin

Bosseboeuf

2018

Journal of Applied Physics

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Interdiffusion in gold/titanium films with titanium evaporated on silicon at different oblique angles (0 , 30 , 50 , and 70) and gold evaporated under normal incidence is investigated using a scanning electron microscope and in-situ sheet resistance measurements for the optimization of the films' effective gettering ability during and after a low-temperature thermal activation. Films have a tilted columnar structure and a porosity increasing with the deposition angle in agreement with calculated values. The oxygen effective gettering ability, characterized by energy-dispersive X-ray spectroscopy, increases with the deposition angle. It is shown that the gold/titanium film with titanium deposited with an oblique angle of 50 is an optimized condition to obtain the largest sorption capacity after 1 h thermal activation at temperatures lower or equal to 300 C. This film has a low initial residual stress that becomes highly tensile if thermal activation is performed above 300 C.

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“…TIR cameras are categorized according to their detector and range of wavelengths. TIR cameras which are used in common industrial applications are usually cameras with a microbolometer sensor [35] as a thermal detector with a wide range of wavelength detection (approx. 2.5 um-20 um).…”

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confidence: 99%

Photogrammetric Co-Processing of Thermal Infrared Images and RGB Images

Dlesk

Vach²,

Pavelka³

2022

Sensors

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In some applications of thermography, spatial orientation of the thermal infrared information can be desirable. By the photogrammetric processing of thermal infrared (TIR) images, it is possible to create 2D and 3D results augmented by thermal infrared information. On the augmented 2D and 3D results, it is possible to locate thermal occurrences in the coordinate system and to determine their scale, length, area or volume. However, photogrammetric processing of TIR images is difficult due to negative factors which are caused by the natural character of TIR images. Among the negative factors are the lower resolution of TIR images compared to RGB images and lack of visible features on the TIR images. To eliminate these negative factors, two methods of photogrammetric co-processing of TIR and RGB images were designed. Both methods require a fixed system of TIR and RGB cameras and for each TIR image a corresponding RGB image must be captured. One of the methods was termed sharpening and the result of this method is mainly an augmented orthophoto, and an augmented texture of the 3D model. The second method was termed reprojection and the result of this method is a point cloud augmented by thermal infrared information. The details of the designed methods, as well as the experiments related to the methods, are presented in this article.

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Vacuum quality evaluation for uncooled micro bolometer thermal imager sensors

Cited by 14 publications

References 20 publications

High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps

High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps

Oblique angle deposition of Au/Ti porous getter films

Photogrammetric Co-Processing of Thermal Infrared Images and RGB Images

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