Vacuum wavelength calibration of frequency-stabilized He-Ne lasers used in commercial laser interferometers

Lee, Won-Kyu; Suh, Hae Sun; Kang, Chu-Shik

doi:10.1117/1.3570680

Cited by 5 publications

(6 citation statements)

References 13 publications

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“…Considering a typical measurement interval of 24 h, the polarization-stabilized He-Ne lasers used within the NPMM-200 showed maximum frequency deviations of 1.2–2.7 MHz (relative frequency deviation Δ f / f = 2.5 × 10 −9 –5.7 × 10 −9 ) from the mean value resulting in a measurement error of 0.5 nm–1.1 nm for a maximum measurement range of 200 mm [ 35 ]. Those results are in accordance with other long-term measurements of internally stabilized He-Ne lasers [ 47 ]. Additionally, changes of the center frequency and the shape of the gain profile directly influence the absolute frequency value of the polarization stabilized He-Ne lasers since the control signals for frequency stabilization are directly derived from the gain profile.…”

Section: Experimental Configuration and Methodssupporting

confidence: 93%

“…Additionally, changes of the center frequency and the shape of the gain profile directly influence the absolute frequency value of the polarization stabilized He-Ne lasers since the control signals for frequency stabilization are directly derived from the gain profile. Therefore, their lifetime wavelength stability is usually limited to 2 × 10 −8 [ 35 , 47 ]. For a measurement range of 200 mm, the corresponding frequency changes of 5–10 MHz would result in a systematic length measurement error of 2–4 nm [ 35 ].…”

Section: Experimental Configuration and Methodsmentioning

confidence: 99%

“…Nevertheless, their uncertainty of 2.1 × 10 −11 can increase to 8.4 × 10 −11 for systems operating as a secondary standard in industry or research labs [ 54 ]. When measuring a polarization-stabilized against an iodine-stabilized He-Ne laser the uncertainty of the frequency calibration is given by the frequency stability of the specific laser under test [ 47 ]. For polarization-stabilized lasers, relative standard uncertainties (Typ B, k = 2) between 1.3 × 10 −9 and 5.7 × 10 −9 for a 24 h-measurement interval have been reported [ 47 ].…”

Section: Experimental Configuration and Methodsmentioning

confidence: 99%

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A GPS-Referenced Wavelength Standard for High-Precision Displacement Interferometry at λ = 633 nm

Blumröder

Köchert

Fröhlich

et al. 2023

Sensors

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Since the turn of the millennium, the development and commercial availability of optical frequency combs has led to a steadily increase of worldwide installed frequency combs and a growing interest in using them for industrial-related metrology applications. Especially, GPS-referenced frequency combs often serve as a “self-calibrating” length standard for laser wavelength calibration in many national metrology institutes with uncertainties better than u = 1 × 10−11. In this contribution, the application of a He-Ne laser source permanently disciplined to a GPS-referenced frequency comb for the interferometric measurements in a nanopositioning machine with a measuring volume of 200 mm × 200 mm × 25 mm (NPMM-200) is discussed. For this purpose, the frequency stability of the GPS-referenced comb is characterized by heterodyning with a diode laser referenced to an ultrastable cavity. Based on this comparison, an uncertainty of u = 9.2 × 10−12 (τ = 8 s, k = 2) for the GPS-referenced comb has been obtained. By stabilizing a tunable He-Ne source to a single comb line, the long-term frequency stability of the comb is transferred onto our gas lasers increasing their long-term stability by three orders of magnitude. Second, short-term fluctuations-related length measurement errors were reduced to a value that falls below the nominal resolving capabilities of our interferometers (ΔL/L = 2.8 × 10−11). Both measures make the influence of frequency distortions on the interferometric length measurement within the NPMM-200 negligible. Furthermore, this approach establishes a permanent link of interferometric length measurements to an atomic clock.

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Section: Experimental Configuration and Methodssupporting

confidence: 93%

Section: Experimental Configuration and Methodsmentioning

confidence: 99%

Section: Experimental Configuration and Methodsmentioning

confidence: 99%

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A GPS-Referenced Wavelength Standard for High-Precision Displacement Interferometry at λ = 633 nm

Blumröder

Köchert

Fröhlich

et al. 2023

Sensors

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“…By fitting the peak of the Fourier transform (resolution ∼0.0005 waves), a scan using steps of one red HeNe wave and a displacement range of 2047 waves measured the number of yellow waves per red wave in air as 1.06543 AE 0.00003. Using a red HeNe wavenumber 33 [in dry air at local atmospheric pressure (∼620 Since the reflective coating of one surface is bonded to the other mirror substrate, the coating can limit the strength of the bond between mirrors. Torr Seal® is useful as a structural adhesive and should allow roof mirrors to be used within a temperature range of −45 to 120°C, but not for the cryogenic applications of Refs.…”

Section: Resultsmentioning

confidence: 99%

Lightweight hollow rooftop mirrors for stabilized interferometry

Hill¹,

Courtney²,

Park³

et al. 2013

Opt. Eng

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Abstract. Hollow rooftop mirrors, also known as dihedral retroreflectors, can simultaneously preserve polarization, minimize chromatic dispersion, and allow beams to be stacked inside an interferometer. Two hollow rooftop mirrors were fabricated and characterized using a Fizeau interferometer and an inexpensive home-built jig instead of a master cube. The mass was 3.3 g for a clear aperture surface area of 110 mm 2 with maximum retroreflected beam deviation of 12 arc s. With a hollow rooftop mirror mounted on a piezoelectric transducer in one arm of a Mach-Zehnder interferometer, a displacement stability of AE0.8 nm rms was achieved using active feedback. The rooftop mirrors' suitability for Fourier transform spectroscopy was demonstrated.

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“…More elaborate considerations are given by Lee [13], who concluded from a large amount of laser interferometers calibrated over some decades that, in general, the relative wavelength deviation is within 1 × 10 −7 from the nominal value, the stability remains well within the 10 −8 level, and the drift over years may be a few times 10 −8 but not much more.…”

Section: Laser Frequency Calibration: λVmentioning

confidence: 99%

Calibration of Displacement Laser Interferometer Systems for Industrial Metrology

Haitjema

2019

Sensors

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Displacement laser interferometer systems are widely used for the calibration of machine tools and CMMs (Coordinate Measuring Machines). Additionally, they are often the workhorse in dimensional calibration laboratories, where they act as the basic metrological traceability link for many calibrations. This paper gives a review of the calibration of such systems, where several approaches, such as the calibrations of separate components or the system as a whole, are reviewed. The calibrations discussed are: the laser frequency, the counting system, software evaluation of the environmental conditions, environmental and material temperature sensor calibration and the calibration of optics that is part of the system. For these calibrations considerations are given about the ways these can be carried out and about establishing the re-calibration intervals.

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Vacuum wavelength calibration of frequency-stabilized He-Ne lasers used in commercial laser interferometers

Cited by 5 publications

References 13 publications

A GPS-Referenced Wavelength Standard for High-Precision Displacement Interferometry at λ = 633 nm

A GPS-Referenced Wavelength Standard for High-Precision Displacement Interferometry at λ = 633 nm

Lightweight hollow rooftop mirrors for stabilized interferometry

Calibration of Displacement Laser Interferometer Systems for Industrial Metrology

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