2008
DOI: 10.1007/s00542-008-0601-8
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Validation of micromechanical systems

Abstract: For a reliable function of micro-mechanical systems the behavior of the used gear wheels is of extreme importance. But up to now there is no general available method for quality assurance of them. In this paper an adoption of the tangential and radial composite inspection as defined in standards for macroscopic gear wheels to the special needs and boundary conditions in micro technology is proposed. It is based on an examination of the differing results if the same gear wheels are mated with varying angles of … Show more

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Cited by 5 publications
(5 citation statements)
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“…Although it continues to be ambiguous, the term "micro gear" can probably be applied to any miniature gear mechanism that includes key functioning elements, such as pitch or module, with dimensions that fall within the micrometric range [70]. The development of different verification techniques is meanwhile taking place once again in parallel with corresponding progress in the field of microfabrication.…”
Section: New Applicationsmentioning
confidence: 99%
See 1 more Smart Citation
“…Although it continues to be ambiguous, the term "micro gear" can probably be applied to any miniature gear mechanism that includes key functioning elements, such as pitch or module, with dimensions that fall within the micrometric range [70]. The development of different verification techniques is meanwhile taking place once again in parallel with corresponding progress in the field of microfabrication.…”
Section: New Applicationsmentioning
confidence: 99%
“…In 2008, Albers et al proposed the use of tangential and radial composite inspection for gears used in micro mechanisms [70], given the lack of any other suitable method at the time. This entails the adoption of defined standards for macroscopic gears, whose use is proposed for the special needs and operating conditions of microtechnology.…”
Section: New Applicationsmentioning
confidence: 99%
“…[1]. From the described principle, the calculation of the scanned contour of the gear wheels is derived.…”
Section: Contour Calculation and Theoretical Errormentioning
confidence: 99%
“…The research of micromechanical technology is mainly focused on two aspects: the further miniaturization and high integration, and the quality assurance of micro mechanical products [1].…”
Section: Introductionmentioning
confidence: 99%
“…This is mainly due to two reasons: First, fine-pitch gears have complex geometric shapes and small dimensions, making it difficult to produce high-precision gear artifacts; second, there is a lack of ultra-precision measuring instruments for fine-pitch gears with high-precision micro-force measuring probes. What is more, even if master gears can be processed to meet the accuracy requirements, it is difficult to achieve the calibration measurements [16][17][18]. Therefore, verification of software and hardware functions of the fine-pitch gear measurement system and calibration of the instrument are both challenges to be solved.…”
Section: Introductionmentioning
confidence: 99%