Miniaturization of macroscopic mechanical systems enables the opening of new areas of application for micro technological systems. Because of technological restrictions, especially when applying miniaturized conventional manufacturing techniques, shape and material deviations cannot be scaled down in the same dimension like micro parts. Thus, the long-term objective is to ensure the functioning by appropriate design measures. In doing so, determination of the transfer behavior by modeling and simulation is required. This work presents two ways for ensuring the required properties of micro gears and describes how the results do correlate. The experimental way uses the radial composite inspection as it is used in the macroscopic world. The simulative way deploys a rolling simulation by utilization of finite element analysis. The virtual prototypes are originated on measured real test gears. When comparing experiment and simulation of the rolling behavior, in some short and long wave areas deviations can be recognized. These can be ascribed to the reduction from three to two dimensions when modeling. Other deviations might be based on inaccuracies when mounting into the test rig. In other areas quite good correlations of test and simulation could be ascertained.

For a reliable function of micro-mechanical systems the behavior of the used gear wheels is of extreme importance. But up to now there is no general available method for quality assurance of them. In this paper an adoption of the tangential and radial composite inspection as defined in standards for macroscopic gear wheels to the special needs and boundary conditions in micro technology is proposed. It is based on an examination of the differing results if the same gear wheels are mated with varying angles of rotation. Additionally special test rigs are presented which are able to test micro gear wheels. Finally some exemplary results are shown.

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Miniaturization is a trend in mechanical engineering, in which 3D mechanical structures are required. Consequences are changed production and design processes. Furthermore micro-specific design requires in-depth knowledge of production technology. One successful means for ensuring the consideration of these restrictions are design rules. However, many aspects of design relevant knowledge are not restrictive and cannot be represented by design rules. The authors propose the application of design patterns, which represent problem-and solution-oriented knowledge. A pattern describes the abstract solution for a frequently occurring problem in a specific context. This approach was first introduced to architecture and then adapted to software engineering. Also first moves were made to use pattern languages in engineering design. The authors propose design patterns to represent design knowledge for microsystem technologies. As methodological means of support, a pattern lifecycle activity model and subordinate methods are presented.

Design of systems and components being produced with tool-based microtechnologies is strongly driven by technology. Thus, there are multitechnological influences from production, materials or micro-specific effects, which restrictively affect design and have to be considered. Under special regard of these peculiarities and in context with live cycle stages of tool-based microtechnological products, a design flow is presented. This incorporates a new design model, called sickle model visualizing the specific aspects when designing products of tool-based microtechnology. In order to support the design process, design rules are used to transfer knowledge from subsequent and adjacent life cycle stages to the current design stage.