“…These include: measuring the energy loss of alpha particles from alpha emitters (i.e. 241 Am and 212 Bi) and converting to thickness from tabulated energy loss values [12], measuring the energy loss of an alpha beam [10,11,36,37,40,[64][65][66][67], measuring the energy loss of a Li beam [26] and determining the thickness using tabulated stopping power values [68], direct measurement of the film thickness from cross sectional micrographs using TEM with surface roughness evaluated by Scanning Electron Microscopy (SEM) [11,[69][70][71], weight and area measurements [26,30,56,72], by Rutherford Backscattering Spectrometry (RBS) on films grown on bulk substrates [62,65,70,73], and by NIR spectrometry by comparing simulated and measured reflection spectra [18]. AFM [6,67,73], and profilometry [62], have been used to determine the surface roughness and its contribution to the uncertainty.…”