In this work, Bi 2 Te 3 -Sb 2 Te 3 superlattices were prepared by the nanoalloying approach. Very thin layers of Bi, Sb, and Te were deposited on cold substrates, rebuilding the crystal structure of V 2 VI 3 compounds. Nanoalloyed superlattices consisting of alternating Bi 2 Te 3 and Sb 2 Te 3 layers were grown with a thickness of 9 nm for the individual layers. The as-grown layers were annealed under different conditions to optimize the thermoelectric parameters. The obtained layers were investigated in their as-grown and annealed states using x-ray diffraction (XRD), scanning electron microscopy (SEM), energydispersive x-ray (EDX) spectroscopy, transmission electron microscopy (TEM), and electrical measurements. A lower limit of the elemental layer thickness was found to have c-orientation. Pure nanoalloyed Sb 2 Te 3 layers were p-type as expected; however, it was impossible to synthesize p-type Bi 2 Te 3 layers. Hence the Bi 2 Te 3 -Sb 2 Te 3 superlattices consisting of alternating n-and p-type layers showed poor thermoelectric properties.