Vapor Deposition Polymerization of para-Xylylene Derivatives-Mechanism and Applications

Abstract

Vapor deposition polymerization (VDP) of poly(p-xylylene) and its derivatives is discussed. The process, known as parylene technology, is a thinˆlm vacuum deposition method, utilizing [2 2 ]-paracyclophanes as precursor compounds and it is approximately forty years old. Today, thanks to its applications in miniature electromechanical systems (MEMS) and all organic semiconductor (AOS) technologies, it is a subject of a strong renewed scientiˆc interest. The emphasis of this review is put on the mechanism of parylene deposition as well as on this process' applications. As far as the deposition mechanism is concerned it is discussed in terms of both chemical reactions and physical phases and phenomena involved. The occurrence of two diŠerent mechanisms, of which the solid phase addition polymerization takes place at temperatures below monomer melting point, is particularly stressed. The diversity of parylene uses, both present and future, is also discussed with an attention on the development of future biomedical, MEMS and AOS applications.

Effect of different initial finishes and Parylene coating thickness on the surface properties of coated PMMA

“…[23][24][25][26] Parylene, the trade name of poly para-xylylene, refers to a family of polymers used as coating materials because of their unique ability to create a protective layer on various surfaces. 27 Parylene is synthesized by vapor deposition polymerization 28,29 and can form a film of uniform thickness, which is almost impermeable to moisture, [30][31][32] biocompatible, chemically inert, and thermally stable. In addition, it possesses a high level of crystallinity and good mechanical properties.…”

Modified vibrating-mesh nozzles for advanced spray-drying applications

“…1 here] Naturally, spray-, dip-or spin-coating processes are not suitable to change the micron-scale orifices of the aperture template due to potential nozzle blockage. In contrast, the current study achieved homogeneous (conformal) polymer film coated templates by CVD [25,26].…”

Customized Vibrating-Membrane Nozzles for Enhanced Fluid Atomization

“…Conformal polymer films on membrane templates were achieved by CVD with PPXC (trade name parylene C) (Lahann 2006;Gazicki-Lipman 2007). The polymer layer thickness amounted to »1 mm (SEM: »1.1 mm; surface profilometer: »0.8 mm) (Figure 1b).…”