Vapor Phase Deposition of Cubic Boron Nitride Films

Bewilogua, K.; Richter, Frank

doi:10.1002/9783527618217.ch14

Cited by 4 publications

(2 citation statements)

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“…Different review Samantaray and Singh Synthesis and properties of cubic boron nitride (c-BN) thin films papers related to preparation, characterisation, and properties of c-BN films have also been published. [24][25][26][27][28][29][30][31][32] In this review article, some recent developments in c-BN film deposition are discussed, along with characterisation techniques, and c-BN film properties. First, the types of phase and crystal structure of boron nitride are described in the following section.…”

Section: Introductionmentioning

confidence: 99%

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

Samantaray¹,

Singh²

2005

International Materials Reviews

128

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Cubic boron nitride (c-BN) thin films are of significant interest because of their diamond like structure and properties. c-BN shows high thermal conductivity, chemical inertness against ferrous metals even at high temperatures, wide band gap, and good transmittance over a wide spectral range from UV to visible. Applications of c-BN include hard protective coatings for cutting tools, in optical instruments as UV detectors, as emitters, and in high temperature electronic devices. However, synthesis of phase pure c-BN thin films continues to be very challenging. The present study reviews the current status of the synthesis, characterisation, mechanical, electrical, and optical properties of c-BN thin films. Both physical and chemical vapour deposition methods used for the preparation of the c-BN films are covered. In addition, different nucleation and growth models of c-BN formation and growth on different substrates are described. The influence of process parameters such as ion energy, growth temperatures, chemical precursors, bias, and impurities on the nucleation and growth is reviewed. Mechanical properties including hardness, elastic modulus, and stiffness of c-BN films are discussed. The latest developments in electrical properties of the c-BN films based on metal-insulatorsemiconductor (MIS) hetero-structures, interface states, impurity states, conduction mechanism, field emission properties, and negative electron affinity (NEA) are presented. The optical properties and cathodoluminescence characteristics of BN films are also discussed.

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Section: Introductionmentioning

confidence: 99%

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

Samantaray¹,

Singh²

2005

International Materials Reviews

128

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“…Hard translucent bodies of c-BN free of any binder can be obtained at relatively high pressures and temperatures of 7.7 GPa and 2100 C, respectively [22]. c-BN can be deposited as thin films using different techniques such as: (1) the electron cyclotron resonance plasma with NH 3 and BF 3 as the reactant gases; (2) the activated reactive evaporation of H 3 BO 3 in the presence of NH 3 ; (3) the RF plasma CVD under low pressure conditions and negative self-bias using B 2 H 6 and N 2 as the reactants; (4) plasma enhanced CVD from BCl 3 þ NH 3 þ H 2 þ Ar under irradiation of an excimer laser; (5) by the dual ion beam deposition technique where boron atoms are sputtered from a boron target by an Ar þ ion beam and subsequently deposited on a substrate simultaneously bombarded by N 2 þ ions [23]. However, besides the formation of c-BN, hexagonal h-BN is often found in the films.…”

Section: Cubic Boron Nitride (C-bn) (! Boron Carbide Boron Nitride mentioning

confidence: 99%

Hard Materials

Zerr

Eschnauer²,

Kny

2012

Ullmann's Encyclopedia of Industrial Chemistry

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The article contains sections titled: 1. Introduction 1.1. Hardness Measurement (Overview) 1.2. Classification of Hard Materials 1.2.1. Occurrence 1.2.2. Appearance 1.2.3. Electrical Conductivity 1.2.4. Composition and Thermal Stability in Air 2. Nonmetallic Hard Materials 2.1. Diamond 2.2. Cubic Boron Nitride (c‐BN) 2.3. Silicon Nitrides 2.4. Transition Metal Nitrides M x N x +1 2.5. Silicon Carbide 2.6. Alumina 2.7. Cermets 3. Metallic Hard Materials (Cemented Carbides) 3.1. Production 3.1.1. Raw Materials 3.1.2. Powder Batch Manufacturing 3.1.3. Pressing and Forming 3.1.4. Sintering 3.1.5. Machining 3.1.6. Coating 3.1.7. Testing and Quality Control 3.2. Commercial Grades 3.3. Properties 3.4. Uses 3.5. Economic Aspects 3.6. Toxicology Hard materials are solid substances exhibiting a high resistance towards plastic (irreversible) deformation or damage of their surface by scratching (Mohs or Martens scale), grinding (Rosiwal method) or indentation (Brinell, Rockwell, Shore, Vickers, or Knoop testing). Some of them occur in nature but the majority is synthetic. They are also classified according to their appearance, electric conductivity, and chemical composition which defines their thermal stability in air. This article gives an overview of the synthesis routes, properties, and fields of application of the most important nonmetallic and metallic hard materials. A few recently discovered hard compounds are briefly introduced. Finally, the family of cemented carbides is discussed in more detail, which is broadly used today for cutting of ferrous alloys, in forming equipment, mining industry, and wear resistant components.

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Schichten aus kubischem Bornitrid (cBN) f?r innovative AnwendungenCubic Boron Nitride Coatings for Innovative Applisations

Keunecke¹,

Bewilogua²

2001

VIP

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Schichten aus kubischem Bornitrid (cBN), dem nach Diamant zweithärtesten aller bekannten Materialien, wurden mit einem Sputter‐Prozess hergestellt. Ein neuartiger Schichtaufbau, der auf einem speziellen B‐C‐N‐Schichtsystem basiert, ermöglicht die Abscheidung von cBN‐Schichten mit über 2μm Dicke, allerdings bisher nur auf Siliciumsubstraten. Die Eigenschaften der Schichten sind denen von massivem cBN sehr ähnlich. Es wurden vielversprechende Experimente zur Übertragung dieses für Werkzeugbeschichtungen und vielfältige andere Anwendungen interessanten Schichtsystems auf Werkzeugsubstrate durchgeführt. Erste Untersuchungen der mechanisch‐tribologischen Eigenschaften der auf Hartmetall‐ und Stahlsubstraten abgeschiedenen Schichten belegen das außergewöhnlich hohe Potential der cBN‐basierten Schichtsysteme.

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Vapor Phase Deposition of Cubic Boron Nitride Films

Cited by 4 publications

References 71 publications

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

Review of synthesis and properties of cubic boron nitride (c-BN) thin films

Hard Materials

Schichten aus kubischem Bornitrid (cBN) f?r innovative AnwendungenCubic Boron Nitride Coatings for Innovative Applisations

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