2007
DOI: 10.1109/jmems.2007.904342
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Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS

Abstract: Abstract-We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors:, and CH 3 (CH 2 ) 17 (CH 2 ) 2 SiCl 3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for t… Show more

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Cited by 82 publications
(59 citation statements)
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“…This lubrication occurs not only at the nano-scale; it is also observed at the macro-scale where the surface roughness is several orders of magnitude larger than the size of adsorbed molecules [3]. Vapor can also be used to deliver a thin molecular coating to protect surfaces from wear [5][6][7].…”
Section: Introductionmentioning
confidence: 99%
“…This lubrication occurs not only at the nano-scale; it is also observed at the macro-scale where the surface roughness is several orders of magnitude larger than the size of adsorbed molecules [3]. Vapor can also be used to deliver a thin molecular coating to protect surfaces from wear [5][6][7].…”
Section: Introductionmentioning
confidence: 99%
“…Water vapor in the deposition chamber can induce the polymerization of silane molecules. 28,29 Due to this polymerization, aggregations may form and induce poor thermal stability of hydrophobic film. 28,29 As a result, a lower base pressure of 0.5 Torr was maintained to avoid aggregation of the precursor.…”
Section: Resultsmentioning
confidence: 99%
“…28,29 Due to this polymerization, aggregations may form and induce poor thermal stability of hydrophobic film. 28,29 As a result, a lower base pressure of 0.5 Torr was maintained to avoid aggregation of the precursor. Figure 3 shows the surface energy, contact angle, and contact angle hysteresis on vapor SAM coated Ni surfaces as functions of chamber temperature at a base pressure of 0.5 Torr.…”
Section: Resultsmentioning
confidence: 99%
“…In this paper, we present a simple surface treatment process to allow moulding of PDMS against a PDMS master involving vapour phase deposition of 1H,1H,2H,2Hperfluorodecyltrichlorosilane (FDTS) onto the PDMS surface to reduce adhesive interaction. A similar approach for silicon substrates or SU-8 moulds has previously been reported to provide excellent anti-stiction surfaces to improve the release of structures [19][20][21]. But, to our knowledge, there have been no previous reports on vapour deposition of FDTS on PDMS to promote anti-stiction.…”
Section: Introductionmentioning
confidence: 87%