Vapour-phase synthesis of titanium nitride powder

Dekker, J.P.; Put, P.J. Van der; Veringa, H.J.; Schoonman, J.

doi:10.1039/jm9940400689

Cited by 48 publications

(30 citation statements)

References 7 publications

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“…[9] At high substrate temperatures, TiN has been deposited from TiCl 4 and a nitrogen/hydrogen mix (1100 C); this has proved particularly effective for coating machine-tool parts. [10] Titanium nitride adopts a face-centered cubic (fcc) NaCl structure and combines the excellent electrical and thermal properties of a metal with the refractory nature of a ceramic. [11] The other early transition-metal nitrides, including VN, NbN, TaN, HfN, and ZrN, all have predominant fcc NaCl phases with similar properties to TiN.…”

mentioning

confidence: 99%

Atmospheric-Pressure CVD of Vanadium Oxynitride on Glass: Potential Solar Control Coatings

Elwin

Parkin

2000

Chem. Vap. Deposition

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confidence: 99%

Atmospheric-Pressure CVD of Vanadium Oxynitride on Glass: Potential Solar Control Coatings

Elwin

Parkin

2000

Chem. Vap. Deposition

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“…Combined with the bio-compatibility of TiN, high absorption efficiency of simple-geometry nanoparticles is of high interest [29]. Titanium nitride nanoparticles in powder form can be fabricated by using nitridation of Ti or TiO 2 at high temperatures, laser ablation of Ti or TiN targets, mechanical alloying, microwave plasma technique, vapor synthesis, reduction-nitridation, and other techniques [16,31,[42][43][44][45][46][47][48]. In this work, aqueous solutions are prepared with commercially available TiN powders (PlasmaChem) with an average nanoparticle size of 50 nm.…”

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confidence: 99%

Colloidal Plasmonic Titanium Nitride Nanoparticles: Properties and Applications

et al. 2015

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Optical properties of colloidal plasmonic titanium nitride nanoparticles are examined with an eye on their photothermal and photocatalytic applications via transmission electron microscopy and optical transmittance measurements. Single crystal titanium nitride cubic nanoparticles with an average size of 50 nm, which was found to be the optimum size for cellular uptake with gold nanoparticles [1], exhibit plasmon resonance in the biological transparency window and demonstrate a high absorption efficiency. A self-passivating native oxide at the surface of the nanoparticles provides an additional degree of freedom for surface functionalization. The titanium oxide shell surrounding the plasmonic core can create new opportunities for photocatalytic applications. an excitement to develop technologies for a broad range of applications. The wide range of carrier concentrations available from several material classes spans the electromagnetic spectrum from the ultra-violet through the midinfrared [2]. Additionally, the broad variety of materials studied in the field provide extra degrees of freedom to solve technological challenges thanks to the unique properties such as tunability, process compatibility, chemical stability, etc [3]. KeywordsTransition metal nitrides, especially titanium nitride (TiN), have been studied for the last three decades due to the unique combination of their material properties [4]. Metallic behavior of TiN combined with its hardness and chemical stability has attracted attention in microelectronics research [5]. Adjustable optical properties and stoichiometry of TiN thin films were examined in the 1990s [6]. The optical characterization of TiN thin films was extensively performed later with the increasing interest in the field of plasmonics [7][8][9][10]. Improved properties with epitaxial TiN thin films have recently been demonstrated with a hyperbolic metamaterial and a plasmonic waveguide [11,12]. As a refractory plasmonic material, TiN holds the potential to solve critical issues associated with the softness and low melting points of plasmonic metals such as gold and silver [13,14]. In contrast to thin films, TiN nanoparticles have not been extensively studied until recently. Localized surface plasmons (LSPs) in TiN nanoparticles were first theoretically analyzed by Quinten [15], while their first experimental demonstration was performed by Reinholdt et al. [16] In their work, cubic nanoparticles smaller than 10 nm with a broad size dispersion were fabricated through laser ablation, and plasmon resonance peaks centered around 730 nm wavelength were reported. Reinholdt et al. proposed the use of TiN nanoparticles as inorganic, stable color pigments. We have previously shown that TiN nanoparticles provide field enhancement comparable to that achievable with Au, with a broader peak spectrally positioned in the biological transparency window [17]. In a more recent study, we experimentally analyzed the absorption efficiencies of lithographically fabricated TiN and Au nanoparticles an...

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“…A significantly smaller particle size is found at higher reaction temperatures. The primary particle size is typically 10 nm at reaction temperatures higher than 1200 K. A possible mecha- nism for this sudden decrease in particle size, with increasing reaction temperature, will be discussed in a forthcoming paper by Dekker et al (1993). These high reaction temperatures are not desirable for the synthesis of coherent layers by the PP-CVD process, as will be shown.…”

Section: Resultsmentioning

confidence: 98%

“…Tubular porous alumina substrates are used in order to be able to measure the degree of porosity of the deposited layer by gas permeability measurements (Dekker et al, 1992). The influence of the reaction temperature on particle size, particle concentration in the gas phase as well as the influence of the reaction temperature, temperature gradient on microstructure, and porosity of the deposit have been investigated.…”

Section: Aerosol Science and Technology 19549-561 11993)mentioning

confidence: 99%

Gas-to-Particle Conversion in the Particle Precipitation–Aided Chemical Vapor Deposition Process I. Synthesis of the Binary Compound Titanium Nitride

Dekker

Put

Veringa

et al. 1993

Aerosol Science and Technology

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Particle precipitation-aided chemical vapor deposition (PP-CVD) is a modification of the conventional CVD process, where an aerosol is formed in the gas phase a t an elevated temperature, and particles are deposited on a cooled substrate. The synthesis of titanium nitride (TIN), using titanium tetrachloride vapor (TiCI,), nitrogen (N,), ammonia (NH,), and hydrogen (Hz), by the PP-CVD process is studied. TiN is formed by a heterogeneous reaction, using TiCI,, N2, Hz, whereas simultaneously TiC1, and NH, react to form an aerosol. The activation energy of this homogeneous reaction is on the order of 100 kJ/mol. The powder formation process is determined by the dissociation of a titanium containing intermediate species. At low temperature differences between substrate and gas phase (i.e., < 2 K), only dense columnar microstructures, with growth rates of around 20 p m / h , are ohsemed. At these temperature differences no particle deposition is observed. The layers are formed by a molecular diffusion controlled CVD growth mechanism. Porous coherent layers are found in experiments, where intermediate temperature differences are applied (i.e., approximately 2-10 K). The observed interconnection of the particles has to originate from a heterogeneous reaction. Apparently, under these conditions the heterogeneous reaction is fast enough, with respect to the particle precipitation rate, to interconnect the precipitated particles. A further increase in temperature difference between the susceptor and the gas phase only leads to loose powder deposits. In principle, the PP-CVD process is a suitable method for the synthesis of thin porous layers of ceramics. To obtain uniform coherent porous layers two separate reaction mechanisms are required under the same experimental conditions. There should be a homogeneous reaction in the gas phase as well as a heterogeneous reaction, which is controlled by surface kinetics, in order to interconnect precipitated particles to obtain a coherent porous layer. Porous ceramic layers can be formed as long as the particle precipitation rate is slow enough with respect to the heterogeneous reaction rate.

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Vapour-phase synthesis of titanium nitride powder

Cited by 48 publications

References 7 publications

Atmospheric-Pressure CVD of Vanadium Oxynitride on Glass: Potential Solar Control Coatings

Atmospheric-Pressure CVD of Vanadium Oxynitride on Glass: Potential Solar Control Coatings

Colloidal Plasmonic Titanium Nitride Nanoparticles: Properties and Applications

Gas-to-Particle Conversion in the Particle Precipitation–Aided Chemical Vapor Deposition Process I. Synthesis of the Binary Compound Titanium Nitride

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