Plasma polymer thin films are useful in a variety of different fields. In this article, the fragmentation of ethanol during plasma polymerization at different discharge powers (2-32 W) is described. The positive ion mass spectrometry data of the plasma phase demonstrated formation of oligomeric species of the and [4MþH] þ . At the same time, there was abundant fragmented species most dominant being ethylene C 2 H 4 , acetylene C 2 H 2 , water H 2 O, and hydrogen H 2 . X-ray photoelectron spectroscopy was used to relate the mass spectroscopy data of the plasma to the chemistry of the deposited films. Depletion of oxygen in the deposit correlated with greater fragmentation in the plasma phase at higher plasma power.