“…1-5͔͒ shows that stable and rectifying metal contacts to ZnO remain a challenge. Indeed, surface traps, adsorbates, 3,4 processing, 1,5 hydrogen, 6 orientation, and surface dipoles 7 can all affect ZnO's surface and interface properties. Here we use nanoscale depth-resolved cathodoluminescence spectroscopy ͑DRCLS͒ coupled with surface science and electronic transport techniques to separate these extrinsic effects and show that near-interface native defects, both resident in the bulk and created by metallization, dominate rectification, recombination, and tunneling features of the metal-ZnO contact.…”