1996
DOI: 10.1063/1.1146586
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Versatile three-dimensional cryogenic micropositioning device

Abstract: A simple design for a mechanically driven three-dimensional cryogenic micropositioner is presented. The design is based on a parallelogram structure constructed from leaf springs and wires. Actuation is achieved by the elastic deformation of the parallelogram by screws. Positions within a volume of roughly (2 mm)3 are attainable. The precision and reproducibility of positioning are in the μm-range. The deviations from linearity are smaller than 10% for the whole working range and the deviation from orthogonali… Show more

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Cited by 13 publications
(5 citation statements)
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“…The prototype unit had a deflection sensitivity of 0.3 mm/V and travelled a distance of -60 mm. Heil et al [2] designed a three-dimensional cryogenic micropositioner which was based on a parallelogram structure that was constructed from leaf springs and wires. The actuation was achieved by the elastic deformation of the parallelogram using screws.…”
Section: Introductionmentioning
confidence: 99%
“…The prototype unit had a deflection sensitivity of 0.3 mm/V and travelled a distance of -60 mm. Heil et al [2] designed a three-dimensional cryogenic micropositioner which was based on a parallelogram structure that was constructed from leaf springs and wires. The actuation was achieved by the elastic deformation of the parallelogram using screws.…”
Section: Introductionmentioning
confidence: 99%
“…11 Another design, a bimorph-driven X -Y -Z translation stage 12 achieved the sensitivity of deformation of 0.3 m/V and the moving range was 660 m. The design of using leaf springs was found in a three-dimensional ͑3D͒ microposition mechanism. 13 Scott-Russel linkage was integrated in a linear micropositioner 14 and achieved resolution of 40 nm with a travel of greater than 100 m. A piezoelectric driven precision XY z microposition mechanism 15 achieved the displacement sensitivity of 0.12 m/V with 10 nm resolution in the X and Y axes, 4.2 rad/V with 0.15 rad resolution in the z axis and interaction between axes was within 1.2%.…”
Section: Introductionmentioning
confidence: 99%
“…One PC (emitter) was used to inject carriers into the crystal and the other PC (collector) detected the collector voltage V c . For certain values of a longitudinal magnetic field B l (along the line connecting emitter and collector, Sharvin geometry) he observed peaks in V c , a phenomenon which he called longitudinal electron focusing.We recently presented a new experimental technique which allows one to image the far field radiation pattern of a carrier point source [3][4][5][6]. The real space imaging capability makes this technique the ideal tool for studies of the spatial distribution of the trajectories of carriers under the influence of a magnetic field, for example in the Sharvin geometry.…”
mentioning
confidence: 99%
“…We recently presented a new experimental technique which allows one to image the far field radiation pattern of a carrier point source [3][4][5][6]. The real space imaging capability makes this technique the ideal tool for studies of the spatial distribution of the trajectories of carriers under the influence of a magnetic field, for example in the Sharvin geometry.…”
mentioning
confidence: 99%
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