“…The development of third-generation wide-bandgap semiconductor materials has received more attention due to the increase in demand for high-power, high-temperature, and high-frequency electronic devices used in the aerospace industry, electric vehicles, and advanced nuclear systems. − Especially, silicon carbide (SiC) based highly efficient power electronic devices have fascinated more in achieving an advanced energy-saving society because of its superior material properties such as high thermal conductivity, mechanical stability, and so forth. − However, the lack of a large area on the SiC substrate limits the production of large scale SiC-based devices. To solve this problem, the epitaxial growth of SiC film on the Si substrate has been proposed in recent decades, as it could be easily done by chemical vapor deposition (CVD). − However, the significant lattice and thermal expansion coefficient mismatches between Si and SiC leads to a higher concentration of crystalline defects inside the layers, which affects the breakdown voltage and carrier mobility. ,, …”