Vertical High-$Q$ RF-MEMS Devices for Reactive Lumped-Element Circuits

Klymyshyn, David M.; Börner, M.; Haluzan, Darcy T.; Santosa, Edwin Gono; Schaffer, Melissa; Achenbach, Sven; Mohr, Jürgen

doi:10.1109/tmtt.2010.2079092

Cited by 9 publications

(8 citation statements)

References 22 publications

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“…In [30] and [31], distributed circuits similar to CCC used in the proposed technique are presented, using 3-dB quadrature hybrids and delay lines as a substitute for 180-degree hybrid couplers. In [32], a lumped-element quadrature coupler fabricated using deep X-ray lithography process is presented, enabling approximately 85% area reduction compared to a conventional quadrature hybrid. Thus, drastic miniaturization of the proposed system configuration can be expected through the use of novel circuit structures and fabrication techniques.…”

Section: Cascade-connected Couplersmentioning

confidence: 99%

Four-Stream Parallel Transmission for Short-Range MIMO Using Only Passive Analog Components

Murata

Honma

Nishimori

et al. 2016

IEICE Trans. Commun.

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An analog-beamforming-based eigenmode transmission technique is proposed that employs a network of interconnected 180degree hybrid couplers at both transmitting and receiving sides of a planesymmetrically configured short-range MIMO system. This technique can orthogonalize MIMO channels regardless of array parameters such as antenna spacing and Tx-Rx distance, provided the MIMO array is symmetric. For verifying the effectiveness of the proposed technique in channel orthogonalization, an experiment is conducted using a 4×4 MIMO array consisting of microstrip antennas and cascade-connected rat-race hybrid couplers. The results indicate a reduction in interference by approximately −28.3 dB on average compared to desired signal power, and the ability to realize fourstream parallel MIMO transmission by using only analog passive networks. The proposed technique can achieve channel capacity almost equivalent to that of eigenbeam space division multiplexing with ideal digital beamforming.

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Section: Cascade-connected Couplersmentioning

confidence: 99%

Four-Stream Parallel Transmission for Short-Range MIMO Using Only Passive Analog Components

Murata

Honma

Nishimori

et al. 2016

IEICE Trans. Commun.

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“…In this case, gap capacitance is relatively high, electric fields are contained mainly within the HAR gaps, and the number of interdigits can be increased considerably, up to minimum feature size and maximum AR limitations of the fabrication process. Deep X-ray lithography with metal electroforming, for instance, has been used to realize ARs of > 50 for metal microwave devices [8], and with very smooth side walls. Such HAR microfabrication methods allow the designer to reach considerable degrees of freedom to trade-off the number and length of interdigits with metal thickness to drastically reduce the cell size and the size of antennas incorporating these cells, while at the same time improving other antenna characteristics such as radiation efficiency.…”

Section: The Advantage Of Thick Interdigitated Gapsmentioning

confidence: 99%

“…Maintaining the radiation efficiency (originating from the ohmic loss) of a small antenna is also a challenge in antenna miniaturization. Consequently, considerable effort has been dedicated to the design of efficient and compact passive RF components [1][2][3][4][5][6][7][8][9][10]. A number of size reduction methods have been studied, including using fractal-shaped patterns [10], applying dielectric [2] or magnetic [11] materials around the element, utilizing lumped [2] or parasitic [1] elements, applying metamaterial based ideas [9], enhancing the slow-wave behavior through periodic loading [12], etc..…”

Section: Introductionmentioning

confidence: 99%

Thick Metal Ebg Cells With Narrow Gaps and Application to the Design of Miniaturized Antennas

Hosseini¹,

Klymyshyn²,

Wells³

et al. 2014

PIER

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Abstract-The paper presents a methodology to achieve efficient low-profile electromagnetic bandgap (EBG) antennas based on thick EBG unit cells. The EBG cells are composed of thick metal patches separated by narrow high aspect ratio (HAR) gaps, and positioned on a PEC-backed substrate. This approach yields new miniaturized EBG cells with considerably reduced electrical size. The miniaturized cells are employed to demonstrate new compact self-excited EBG resonator antennas with considerably reduced operating frequencies. Full-wave simulations and experimental results demonstrate the design approach.

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“…DXRL therefore excels in the fabrication of microstructures with large vertical dimensions, usually ranging from tens to hundreds of micrometers, with very parallel, vertical and optically smooth sidewalls. Typical applications include microoptics (Mohr et al, 1997), electrostatics (Klymyshyn et al, 2010) and mechanical devices (Meyer et al, 2008). Unlike many synchrotron beamlines used for analyses, DXRL beamlines do not require monochromatic radiation.…”

Section: Introductionmentioning

confidence: 99%

Characterization of the surface contamination of deep X-ray lithography mirrors exposed to synchrotron radiation

Achenbach

Wells

Shen

2018

J Synchrotron Radiat

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In deep X-ray lithography (DXRL), synchrotron radiation is applied to pattern polymer microstructures. At the Synchrotron Laboratory for Micro and Nano Devices (SyLMAND), Canadian Light Source, a chromium-coated grazing-incidence X-ray double-mirror system is applied as a tunable low-pass filter. In a systematic study, the surface conditions of the two mirrors are analyzed to determine the mirror reflectivity for DXRL process optimization, without the need for spectral analysis or surface probing: PMMA resist foils were homogeneously exposed and developed to determine development rates for mirror angles between 6 mrad and 12 mrad as well as for white light in the absence of the mirrors. Development rates cover almost five orders of magnitude for nominal exposure dose (deposited energy per volume) values of 1 kJ cm to 6 kJ cm. The rates vary from case to case, indicating that the actual mirror reflectivity deviates from that of clean chromium assumed for the experiments. Fitting the mirror-based development rates to the white-light case as a reference, reflectivity correction factors are identified, and verified by experimental and numerical results of beam calorimetry. The correction factors are related to possible combinations of a varied chromium density, chromium oxidation and a carbon contamination layer. The best fit for all angles is obtained assuming 7.19 g cm nominal chromium density, 0.5 nm roughness for all involved layers, and an oxide layer thickness of 25 nm with a carbon top coat of 50 nm to 100 nm. A simulation tool for DXRL exposure parameters was developed to verify that the development rates for all cases do coincide within a small error margin (achieving a reduction of the observed errors by more than two orders of magnitude) if the identified mirror surface conditions are considered when calculating the exposure dose.

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Vertical High-$Q$ RF-MEMS Devices for Reactive Lumped-Element Circuits

Cited by 9 publications

References 22 publications

Four-Stream Parallel Transmission for Short-Range MIMO Using Only Passive Analog Components

Four-Stream Parallel Transmission for Short-Range MIMO Using Only Passive Analog Components

Thick Metal Ebg Cells With Narrow Gaps and Application to the Design of Miniaturized Antennas

Characterization of the surface contamination of deep X-ray lithography mirrors exposed to synchrotron radiation

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