2012
DOI: 10.1038/nnano.2011.249
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Vertical nanowire electrode arrays as a scalable platform for intracellular interfacing to neuronal circuits

Abstract: Deciphering the neuronal code - the rules by which neuronal circuits store and process information - is a major scientific challenge1,2. Currently, these efforts are impeded by a lack of experimental tools that are sensitive enough to quantify the strength of individual synaptic connections and also scalable enough to simultaneously measure and control a large number of mammalian neurons with single-cell resolution3,4. Here, we report a scalable intracellular electrode platform based on vertical nanowires that… Show more

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Cited by 541 publications
(610 citation statements)
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“…Ti/TiN base electrodes with different diameters are covered by a sacrificial amorphous silicon (a-Si) layer. This layer is used as a template and structured via deep reactive ion etching (DRIE) with alternating fluxes of C 4 F 8 and SF 6 for passivation and etching respectively. Thus, a structure width of about 400 nm and an aspect ratio of about 1:7.5 can be achieved [11].…”
Section: Fabrication Processmentioning
confidence: 99%
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“…Ti/TiN base electrodes with different diameters are covered by a sacrificial amorphous silicon (a-Si) layer. This layer is used as a template and structured via deep reactive ion etching (DRIE) with alternating fluxes of C 4 F 8 and SF 6 for passivation and etching respectively. Thus, a structure width of about 400 nm and an aspect ratio of about 1:7.5 can be achieved [11].…”
Section: Fabrication Processmentioning
confidence: 99%
“…If the electrodes are sufficiently small -i.e. if their diameter is in the order of 200 nm -they can penetrate the cell membrane and hence measure intracellular signals [6] [7]. This results in an improved electrical coupling and enables the detection of sub-threshold events [6] [7].…”
Section: Introductionmentioning
confidence: 99%
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“…The proposed technique can be engaged along with the current state-of-the-art in monitoring intracellular potential recordings. 15,16 An indicative example would be the application with Utah electrode arrays, in which ITO deposition on the active electrode tips before parylene encapsulation would finally yield a 3-D chemical sensing array. 17 The fabricated sensor has been characterized with the aid of discrete devices based on the electrostatic coupling between the H þ and the insulating membrane.…”
Section: -mentioning
confidence: 99%
“…In practice, this involves transiently rapturing the cell membrane by applying a zap voltage to a nanostructured electrode, thus allowing the electrodes to enter the cell and perform pseudo-intracellular recording until the raptured membrane reorganizes. 1,12,13 In this letter, we propose an alternative approach to increase the neuron-electrode seal for amplifying signals in extracellular recordings. This is achieved by covering neurons with an electrically resistive sheet.…”
mentioning
confidence: 99%