2004
DOI: 10.1002/pssc.200404771
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Vertical transport in group III‐nitride heterostructures and application in AlN/GaN resonant tunneling diodes

Abstract: We present a systematic study of vertical transport in AlGaN/GaN heterostructures. The influence of barrier thickness and Al-concentration on the current across AlGaN barriers is investigated experimentally and compared to model calculations. The effect of polarization fields on the electronic properties of single-and double barrier heterostructures is discussed and experimental results are reviewed. AlN/GaN double barrier RTD structures are fabricated under optimized growth conditions. Experimental analysis o… Show more

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Cited by 51 publications
(33 citation statements)
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“…We observe that the structural quality of GaN/AlN superlattices is particularly sensitive to the Ga/N ratio; the strain fluctuations induced by alternating GaN and AlN layers favor the formation of V-shaped pits, even in the Ga-bilayer growth window. 70,71 Strain relaxation by V-pit formation at terminated dislocations is commonly observed in GaN-related materials, particularly in the InGaN/GaN system, 72 where the majority of threading dislocations has no driving force to glide or is kinetically impeded to glide at the growth temperature. V pits are generally inverted hexagonal pyramids with ͕10-11͖ facets.…”
Section: Use Of a Ga Excessmentioning
confidence: 99%
“…We observe that the structural quality of GaN/AlN superlattices is particularly sensitive to the Ga/N ratio; the strain fluctuations induced by alternating GaN and AlN layers favor the formation of V-shaped pits, even in the Ga-bilayer growth window. 70,71 Strain relaxation by V-pit formation at terminated dislocations is commonly observed in GaN-related materials, particularly in the InGaN/GaN system, 72 where the majority of threading dislocations has no driving force to glide or is kinetically impeded to glide at the growth temperature. V pits are generally inverted hexagonal pyramids with ͕10-11͖ facets.…”
Section: Use Of a Ga Excessmentioning
confidence: 99%
“…The strain fluctuations induced by Si doping and by the presence of the AlN barriers favor the formation of V-shaped pits, even in layers grown in the regime of 2 ML Ga-excess [18,28]. The suppression of these defects has been achieved by an enhancement of the Ga-flux so that growth is performed at the limit of Ga-accumulation.…”
Section: Quantum Well Structuresmentioning
confidence: 99%
“…The quality of the GaN/AlN heterostructures was found to be particularly sensitive to the Ga/N ratio. The strain fluctuations induced by Si doping and by the presence of the AlN barriers favor the formation of V-shaped pits, even in layers grown in the regime of 2 ML Ga-excess [15,8]. The suppression of these defects has been achieved by an enhancement of the Ga-flux so that growth is performed at the limit of Ga-accumulation.…”
Section: Si-doped Gan/aln Multiple-quantum-well Structuresmentioning
confidence: 99%