Vertically integrated double-layer on-chip silicon membranes for 1-to-12 waveguide fanouts

Zhang, Yang; Hosseini, Amir; Ahn, Jae Sook; Kwong, David; Fallahazad, Babak; Tutuc, Emanuel; Chen, Ray T.

doi:10.1063/1.4709489

Cited by 6 publications

(2 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The SWG grating coupler on glass reaches a coupling efficiency of 39.17% at 1555.56 nm, with a 1-dB bandwidth of 29 nm. Double-layer stacked 1 Â 12 multimode interference couplers were also demonstrated based on SiNMs for potential applications in vertically integrated 3-D photonics [60].…”

Section: Nm Integrated Systemsmentioning

confidence: 99%

Breakthroughs in Photonics 2012: Breakthroughs in Nanomembranes and Nanomembrane Lasers

Zhou

2013

IEEE Photonics J.

View full text Add to dashboard Cite

Crystalline semiconductor nanomembranes (NMs) offer unprecedented opportunities for unique electronic and photonic devices for vertically stacked high-density photonic/ electronic integration, high-performance flexible electronics, and adaptive flexible/conformal photonics. We present here major progresses reported over the last year, in the area of semiconductor NM photonics, with focuses on the innovative membrane laser devices and structures for silicon photonics and flexible optoelectronics.

show abstract

Section: Nm Integrated Systemsmentioning

confidence: 99%

Breakthroughs in Photonics 2012: Breakthroughs in Nanomembranes and Nanomembrane Lasers

Zhou

2013

IEEE Photonics J.

View full text Add to dashboard Cite

show abstract

“…Other approaches have been investigated to build double-layer structures comprised of crystalline silicon, including silicon nanomembrane transfer 11,12 and direct wafer bonding. 13 However, coupling between separate layers has not been demonstrated in the aforementioned methods. Adhesive bonding, which has been used in fabricating photonic devices on single crystalline silicon nanomembrane, 14,15 serves as a good candidate for fabricating double-layer PICs.…”

mentioning

confidence: 99%

On-chip intra- and inter-layer grating couplers for three-dimensional integration of silicon photonics

Zhang

Kwong

et al. 2013

Applied Physics Letters

Self Cite

View full text Add to dashboard Cite

We present on-chip intra- and inter-layer grating couplers fabricated on double-layer, single crystalline silicon nanomembranes. The silicon nanomembranes were fabricated using an adhesive bonding process. The grating couplers are based on subwavelength nanostructures operating at the transverse-electric polarization. Such nanostructures can be patterned in a single lithography/etching process. Simultaneous intra-layer coupling to separate silicon photonic layers is demonstrated through grating couplers with peak efficiencies of 18% and 44% per grating coupler for bottom and top layer, respectively, at 1550 nm wavelength. The inter-layer grating coupler has an efficiency of 25% at 1560 nm wavelength with a 3 dB bandwidth of 41 nm.

show abstract

Recent Progress in Chemiresistive Gas Sensing Technology Based on Molybdenum and Tungsten Chalcogenide Nanostructures

Jha

Bhat

2020

Adv Materials Inter

View full text Add to dashboard Cite

bonding of transition metal and chalcogen atom and their crystal structure. Interestingly, all these compounds exist as layered material except tungsten oxide (WO 3 ) whose hydrated crystal (WO 3 .H 2 O) is layered in nature. [2,3] Each of these chalcogenides possesses unique features. Several micro and nanostructures of these chalcogenides have been synthesized in literature for various applications including gas sensors, biosensors, batteries, supercapacitor, photoelectrochemical and electrochromic devices. However, this review article will focus on gas sensing applications of these materials.Gas sensors play a crucial role in our life as they find applications ranging from monitoring indoor air quality to detecting highly toxic gases. Two important components of a gas sensing device are receptor and transducer. The receptor enables the chemical interaction with the target analyte molecule, which is further converted into analytical signal by the transducer. There are several transduction techniques available in gas sensing based on the physical or chemical change being measured. Broadly, they can be classified into six different classes based on sensing principles which is listed in Table 1.Chemiresistive devices have several advantages over other existing techniques. For example, the structure of these types of devices is very simple and it can be integrated with the current complementary metal oxide semiconductor (CMOS) technology. Even though, several advances have been made over last few years to improve sensing performance, the search for reliable and repeatable gas sensing element is an ongoing endeavor with lots of expectation from tungsten and molybdenum chalcogenides.After the rise of graphene, other layered materials have emerged as important functional materials for various applications of highest scientific values. Among these, layered transition metal dichalcogenides (TMDs) have a special presence as they cover whole class of materials, i.e., ranging from pure insulators to true metals. W and Mo chalcogenides are mostly semiconducting in ambient conditions and therefore, suitable for electronic application such as chemiresistive gas sensors. Though, layered TMDs (MX 2 M = Mo, and W and X = S, Se, and Te) have evolved expeditiously in a very short time, we simply cannot ignore metal oxide (particularly Mo-and W-based Chalcogens are oxygen family elements with oxygen having distinct properties than the other group members like sulfur, selenium, and tellurium. Tungsten and molybdenum chalcogenides that include mainly metal oxides (MO 3 ; M = Mo, and W) and metal dichalcogenides (MX 2 ; X = S, Se, and Te) are the most exciting class of inorganic materials. They have been widely investigated in various applications including lithium and sodium ion storage, supercapacitors, gas sensors, biosensors etc. due to their fascinating surface properties and ease of fabrication. Different class of nanostructures including 0D (nanoparticles, quantum dots), 1D (nanowires, nanotubes, nanoribbons, nanobelts etc.), a...

show abstract

Vertically integrated double-layer on-chip silicon membranes for 1-to-12 waveguide fanouts

Cited by 6 publications

References 21 publications

Breakthroughs in Photonics 2012: Breakthroughs in Nanomembranes and Nanomembrane Lasers

Breakthroughs in Photonics 2012: Breakthroughs in Nanomembranes and Nanomembrane Lasers

On-chip intra- and inter-layer grating couplers for three-dimensional integration of silicon photonics

Recent Progress in Chemiresistive Gas Sensing Technology Based on Molybdenum and Tungsten Chalcogenide Nanostructures

Contact Info

Product

Resources

About