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WS nanosheets have been synthesized by ultrasonication in a binary mixture of acetone and 2-propanol, with a volume ratio of 80:20. Hansen solubility parameters were taken into consideration as part of the process. These nanosheets have been characterized by electron microscopy, atomic force microscopy, and x-ray diffraction, along with spectroscopy such as ultraviolet-visible spectroscopy, Raman spectroscopy, and x-ray photoelectron spectroscopy. The nanosheets were further used as a sensing material to fabricate a humidity sensor on interdigitated aluminum electrodes, realized over Si/SiO substrate using a conventional photolithography technique. The response for our sensor varied from 11.9 for 40% RH to as high as 37.5 for 80% RH. Response and recovery time were found to be 13 ± 2 s and 17 ± 2 s respectively. The suspended nanosheets were also treated with UV light in a nitrogen environment. The response for UV treated nanosheets shows better linearity, however its response decreases in the presence of humidity. This is due to a decrease in oxygen content of the UV treated sample. Furthermore, the effect of sonication time has been investigated, and it was found that samples with 10 h sonication are better than others due to their high surface-to-volume ratio. The repeatability and stability of the sensor have been investigated and found to be excellent. The hysteresis in the sensors was also explored. The mechanism of humidity sensing has been discussed in detail.

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A chemiresistive sensor based on nanocomposites of HCl doped-PANI-nanofibers and WS2 nanosheets which is prepared by the template-free in situ polymerization of aniline on WS2 nanosheets is cost effective, reliable, stable and compatible with the current CMOS technology.

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