1991
DOI: 10.1063/1.104960
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Very high carbon incorporation in metalorganic vapor phase epitaxy of heavily doped p-type GaAs

Abstract: Articles you may be interested inCharacterization of heavily carbondoped GaAs grown by metalorganic chemical vapor deposition and metalorganic molecular beam epitaxy

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Cited by 127 publications
(32 citation statements)
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“…5 shows a plot of mobility as a function of hole concentration, comparing our Hall and IR mobility results to Hall for GaAs:C reported in earlier studies. [3][4][5]12 Although our m h * value is different from the theoretical value adopted by FSP ͑Ref. 28͒ in their work on GaAs:Be, the mobility results for p-type GaAs:C shown in Fig.…”
Section: ͑8͒mentioning
confidence: 73%
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“…5 shows a plot of mobility as a function of hole concentration, comparing our Hall and IR mobility results to Hall for GaAs:C reported in earlier studies. [3][4][5]12 Although our m h * value is different from the theoretical value adopted by FSP ͑Ref. 28͒ in their work on GaAs:Be, the mobility results for p-type GaAs:C shown in Fig.…”
Section: ͑8͒mentioning
confidence: 73%
“…Recently, a number of growth techniques, including metallo-organic chemical vapor deposition, [1][2][3] metallo-organic vapor phase epitaxy, [4][5][6][7] chemical beam epitaxy, 8 and molecular-beam epitaxy ͑MBE͒, 3,[9][10][11][12][13] have made it possible to achieve carbondoped thin-film fabrication with hole concentrations as high as 1.5ϫ10 21 cm Ϫ3 . 12 C-doped GaAs has been shown to have advantages over Be-doped and Zn-doped GaAs for applications in devices requiring pϩϩ GaAs layers.…”
Section: Introductionmentioning
confidence: 99%
“…[3, 4J Ultra-high doping levels (p>1020 cm-3 ) have been attained with epitaxial growth. [5,6] However, implantation ofC is not as successful. Implanted alone, activation of C is less than 10%.…”
Section: Introductionmentioning
confidence: 99%
“…With this method, however, the V/III ratio could not be controlled independently from the dopant source flow. A higher grade of carbon concentration control is possible with the extrinsic doping, which can be realised with different halomethane sources [9][10][11]. Among them we have selected CBr 4 , because is very efficient owing to the low strength of the chemical bond (about 65 Kcal/mole) between carbon nucleus and Br ligand [12].…”
mentioning
confidence: 99%