Very high damage threshold Al 2 O 3 /SiO 2 dielectric coatings for excimer lasers

Kaiser, Norbert; Uhlig, Hein; Schallenberg, Uwe B.; Anton, B.; Kaiser, Ute; Mann, Klaus; Eva, Eric

doi:10.1117/12.180896

Cited by 10 publications

(6 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Very good thresholds of fluoride films are also confirmed at 355 nm, where thresholds of 20 J / cm 2 are reported with a 10-ns pulse width. 7 However, high tensile stresses in the coatings restrict their application. 8 Among oxides and fluorides, wide-band-gap materials are certainly the best candidates to achieve high damage threshold, 6 so materials with an electronic band gap wider than the 355-nm two-photon energy are clearly the best solution to minimize multiphoton absorption.…”

Section: Experiments Details 21 Materials Selectionmentioning

confidence: 99%

Influence of deposition temperature on the properties of high-reflectivity coatings

Zhan

2006

Opt. Eng

View full text Add to dashboard Cite

The effect of deposition temperature on the properties of 355-nm high-reflectivity ͑HR͒ coatings was investigated. A series of 355-nm HR coatings were deposited by electron-beam evaporation using the same deposition process, but different deposition temperatures: 200, 250, 280, and 320°C. Transmittance and high reflectance of the samples were measured with a Lambda 900 spectrometer, and the highest reflectance, 98.7%, was achieved at a deposition temperature of 280°C. The laser-induced damage threshold ͑LIDT͒ was measured with a 355-nm pulsed laser with a pulse width of 8 ns. It was found that the deposition temperature had a significant effect on the LIDT of coatings. LIDTs up to 18.5 J / cm 2 were achieved when the deposition temperature was 280°C. The LIDT of the coating deposited at 280°C is about three times greater than that of coatings deposited at the other temperatures. Damage morphologies of samples at different deposition temperatures were observed with a Leica-DMRXE microscope. Microstructures of the samples were characterized by x-ray diffraction ͑XRD͒. An absorptancedominated model is proposed, which agrees very well with the damage threshold results.

show abstract

Section: Experiments Details 21 Materials Selectionmentioning

confidence: 99%

Influence of deposition temperature on the properties of high-reflectivity coatings

Zhan

2006

Opt. Eng

View full text Add to dashboard Cite

show abstract

“…2͒. A calculated amplitude distribution of the standing electric wave in the layer system and its spectral reflectivity 22,23 are shown in Figs. 3͑a͒ and 3͑b͒.…”

Section: ͑3͒mentioning

confidence: 99%

Investigation of the absorption induced damage in ultraviolet dielectric thin films

et al. 1997

View full text Add to dashboard Cite

The interaction of UV laser radiation with optical coatings is investigated by a pulsed two-probe-beam photothermal technique. UV laser damage resistance studies on LaF3/MgF2, Al2O3/SiO2, HfO2/SiO2 multilayer stacks are performed at lambda = 248 nm and tau = 20 ns. By investigating the relationship of the number, of high-low (HL) pairs and the substrate material, optical and thermal coating properties are shown to be responsible for UV single-shot laser damage. The damage threshold of selected samples is influenced by the deposition technique. The influence of the bandgap energy of typical UV thin film oxide materials on the damage is investigated. Furthermore, multishot damage measurements on LaF3/MgF2, high-reflection multilayer coatings reveal the accumulation of laser energy in the predamage range and lead to an increase in absorption

show abstract

“…Moreover, Al 2 O 3 have low absorption coefficient at 355 nm . As a consequence, it is widely used to realize optical coatings for high performance and laser-damage resistant applications [6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Influence of deposition temperature on the properties of Al<inf>2</inf>O<inf>3</inf> thin films

Zhan

Luo

Shao

2009

2009 Conference on Lasers &Amp; Electro Optics &Amp; The Pacific Rim Conference on Lasers and Electro-Optics

View full text Add to dashboard Cite

show abstract

Very high damage threshold Al 2 O 3 /SiO 2 dielectric coatings for excimer lasers

Cited by 10 publications

References 0 publications

Influence of deposition temperature on the properties of high-reflectivity coatings

Influence of deposition temperature on the properties of high-reflectivity coatings

Investigation of the absorption induced damage in ultraviolet dielectric thin films

Influence of deposition temperature on the properties of Al<inf>2</inf>O<inf>3</inf> thin films

Contact Info

Product

Resources

About