Very large bandwidth IF SAW filters using leaky waves on LiNbO&lt;inf&gt;3&lt;/inf&gt; and LiTaO&lt;inf&gt;3&lt;/inf&gt;

Hakiki, M. El; Damy, J-A.; Hartmann, Hans; Brice, J-M.; Perois, X.

doi:10.1109/ultsym.2011.0327

Cited by 3 publications

(1 citation statement)

References 4 publications

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“…By transferring a YXl-36 LN thin plate onto a substrate, BAW resonators have been fabricated and k t 2 as large as 20% has been achieved in a cavity-type resonance geometry. 10) Nevertheless, the LN layer thinned by mechanical grinding and polishing has a very large thickness of 10 μm, resulting in a resonance frequency in MHz range, which is far below the 4G or 5G working bands.…”

Section: Introductionmentioning

confidence: 99%

Lithium niobate single crystal thin film resonator with benzocyclobutene as a reflective layer

Xing

Shuai

Bai

et al. 2020

Jpn. J. Appl. Phys.

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The intrinsic electromechanical coupling coefficient (kt2) of the piezoelectric material is the decisive factor limiting the band width of the thin film bulk acoustic (FBAR) filters. In the present work, single crystalline LiNbO3 thin films are transferred by crystal ion slicing. Instead of the often used silicon dioxide, Benzocyclobutene is used as the bonding layer, which significantly increases the tolerance of wafer bonding for the surface flatness, thus a patterned bottom electrode is easily buried underneath the LiNbO3 thin film during the ions slicing process. More importantly, this single Benzocyclobutene layer also acts as an effective acoustic reflector, and a large kt2 exceeding 21% is obtained in the LN-based bulk acoustic wave resonator. The Mason model is built up according to the experimental results, and the fitting shows that the Benzocyclobutene has a low acoustic impedance, which effectively confines the acoustic energy within the piezoelectric layer and results in the high kt2.

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Section: Introductionmentioning

confidence: 99%

Lithium niobate single crystal thin film resonator with benzocyclobutene as a reflective layer

Xing

Shuai

Bai

et al. 2020

Jpn. J. Appl. Phys.

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Ultra wideband balanced fan-shaped three-transducer low-loss leaky SAW filters

Sergei

2016

2016 IEEE International Frequency Control Symposium (IFCS)

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Use of the Fan-Shaped Idts – Efficient Method for Creating the Wideband Saw Filters With a Low Insertion Loss and High Rectangularity of Frequency Response

Bagdasaryan

Gulyaev

Dobershtein³

et al. 2021

Radio Communication Technology

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This paper presents an efficient method for creating the wideband SAW filters with high rectangularity, flat amplitude response and low insertion loss in passband – use of fan-shaped IDTs with inclined electrodes. The authors consider the approaches for realization of the fan-shaped filters. The quantitative and qualitative characteristics of the fan-shaped SAW filters with a relative bandwidth ∆f/f0 = 4–75 %, shape factor 1,1–1,96 and insertion loss of 5–18 dB are given for each approach.

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Very large bandwidth IF SAW filters using leaky waves on LiNbO<inf>3</inf> and LiTaO<inf>3</inf>

Cited by 3 publications

References 4 publications

Lithium niobate single crystal thin film resonator with benzocyclobutene as a reflective layer

Lithium niobate single crystal thin film resonator with benzocyclobutene as a reflective layer

Ultra wideband balanced fan-shaped three-transducer low-loss leaky SAW filters

Use of the Fan-Shaped Idts – Efficient Method for Creating the Wideband Saw Filters With a Low Insertion Loss and High Rectangularity of Frequency Response

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