The rigid finite element method (RFEM) has been used mainly for modelling systems with beam-like links. This paper deals with modelling of a single set of electrodes consisting of an upper beam with electrodes, which are shells with complicated shapes, and an anvil beam. Discretisation of the whole system, both the beams and the electrodes, is carried out by means of the rigid finite element method. The results of calculations concerned with free vibrations of the plates are compared with those obtained from a commercial package of the finite element method (FEM), while forced vibrations of the set of electrodes are compared with those obtained by means of the hybrid finite element method (HFEM) and experimental measurements obtained on a special test stand.