Vibration-driven MEMS energy harvester with vacuum UV-charged vertical electrets

Yamashita, Kenji; Honzumi, Makoto; Hagiwara, Kaoru; Iguchi, Yoshinori; Suzuki, Yuji

doi:10.1109/transducers.2011.5969870

Cited by 8 publications

(13 citation statements)

References 11 publications

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“…The more conventional approach for using electrets includes planar electrets, [57], although they can also be deposited on vertical walls, [56,58]. Vertical electrets are more difficult to produce since for example the corona method or ion implantation cannot be used.…”

Section: Electrostatic Transductionmentioning

confidence: 99%

MEMS Technologies for Energy Harvesting

Domínguez-Pumar

Pons-Nin

Chávez-Domínguez

2016

Nonlinearity in Energy Harvesting Systems

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The objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and its application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. Next, the chapter follows with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as by placing fixed magnets, buckling of beams, or by using slightly slanted clamped-clamped beams. Other nonlinear mechanisms are studied such as impact energy transfer, or the design of nonlinear springs. Finally, due to their importance in the field of MEMS and their application to energy harvesters, an introduction to the actuation with piezoelectric materials is made. Examples of energy harvesters found in the literature using this actuation principle are also presented.

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Section: Electrostatic Transductionmentioning

confidence: 99%

MEMS Technologies for Energy Harvesting

Domínguez-Pumar

Pons-Nin

Chávez-Domínguez

2016

Nonlinearity in Energy Harvesting Systems

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“…1(b) shows a Scanning Electron Microscope (SEM) image of the pair of electrodes constituting an in-plane gap closing transducer. Recent progress on fabrication of electrets on the sidewalls of the transducer fingers [23], [24] opens the possibility of operating such transducers in continuous mode with internal biasing. However, we have chosen to use an external bias for characterization of the harvester.…”

Section: A Device Descriptionmentioning

confidence: 99%

Characterization and Modeling of Nonlinearities in In-Plane Gap Closing Electrostatic Energy Harvester

Kaur

Halvorsen

Sorasen

et al. 2015

J. Microelectromech. Syst.

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This paper investigates in detail a micro scale in-plane gap closing electrostatic energy harvester with strong nonlinearities in squeeze-film damping, electromechanical coupling, and impacts on end-stops. The device shows softening response on increasing the bias voltage and saturation behavior on impact with end-stops at high enough acceleration amplitude. We demonstrate that a lumped model can adequately describe the measured nonlinear behavior for a range of operating conditions with nonlinear fluid damping force and impact force included in the model. While modeling capacitances, a finite-element method (FEM) is used to analyze fringing field effects on the capacitance variation for gap closing electrodes. The nominal capacitance is obtained from FEM analysis, for a range of under-cut values in the fabrication process treated as a free parameter in the model. The device modeled for linear and nonlinear squeeze-film damping force highlights the importance of nonlinear damping force to understand the device behavior over the range of operating conditions. With the compliant end-stops treated as spring-dampers and with proper choice of end-stop damping-coefficient, the model successfully captures the end-stop nonlinearities for a particular operating point and reproduces the dynamic pull-in phenomena at 8 V bias, and rms acceleration 0.6 g, as observed in the experiments. Thus, the model described in this paper reproduces the subtle nonlinear effects dominating the dynamics of an in-plane gap closing electrostatic energy harvester.[ 2015-0107]Index Terms-Electrostatic devices, energy harvester, nonlinear systems, vibrations. 1057-7157

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“…Micro-turbine [5] and generator [6] that used electrostatic levitation to drastically reduce friction in the rotor have been reported. Energy harvesting MEMS devices that use mechanical vibrations from the ambience have been explored in recent times [7][8].…”

Section: Introductionmentioning

confidence: 99%

Low voltage — Enhanced actuation MEMS cantilevers using Al<inf>2</inf>O<inf>3</inf>-SiO<inf>2</inf> electrets

Pai

Tabib-Azar

2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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This work introduces a new technique of producing electrets using Al 2 O 3 -SiO 2 bilayer dielectric stack deposited by atomic layer deposition (ALD) technique. The surface potential of the charged electret was -100V corresponding to a negative charge density of ~12pC/cm 2 . Micro-cantilevers patterned on this layer responded to voltages as low as 1V pp , indicating their potential use as high efficiency actuators. The electret retained its charge for as long as 5 weeks in 0.1 mTorr vacuum without any surface treatments. The plasmaassisted atomic layer deposited SiO 2 layer with its higher bandgap of 9 eV produces the charges that are trapped in the lower bandgap Al 2 O 3 away from the surface. The superlattice produced by Al 2 O 3 /SiO 2 stack contains the charges and prevent discharge.

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Vibration-driven MEMS energy harvester with vacuum UV-charged vertical electrets

Cited by 8 publications

References 11 publications

MEMS Technologies for Energy Harvesting

MEMS Technologies for Energy Harvesting

Characterization and Modeling of Nonlinearities in In-Plane Gap Closing Electrostatic Energy Harvester

Low voltage — Enhanced actuation MEMS cantilevers using Al<inf>2</inf>O<inf>3</inf>-SiO<inf>2</inf> electrets

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Vibration-driven MEMS energy harvester with vacuum UV-charged vertical electrets

Cited by 8 publications

References 11 publications

MEMS Technologies for Energy Harvesting

MEMS Technologies for Energy Harvesting

Characterization and Modeling of Nonlinearities in In-Plane Gap Closing Electrostatic Energy Harvester

Low voltage &#x2014; Enhanced actuation MEMS cantilevers using Al<inf>2</inf>O<inf>3</inf>-SiO<inf>2</inf> electrets

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Low voltage — Enhanced actuation MEMS cantilevers using Al<inf>2</inf>O<inf>3</inf>-SiO<inf>2</inf> electrets