Vibration of micromachined circular piezoelectric diaphragms

Hong, Eunki; Trolier-McKinstry, Susan; Smith, Rob; Krishnaswamy, S. V.; Freidhoff, C. B.

doi:10.1109/tuffc.2006.1621496

Cited by 73 publications

(9 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, as the WG width increases in devices 2 and 3, the cut-off frequency reduces to 2.2 and 1.6 MHz as shown in figures 2(b) and (c). Physically this trend arises from the larger membranes composing the WGs in these devices sustaining lower frequency resonances [19]. Indeed the inverse dependence of the cut-off frequency to the WG width is observed irrespective of the hole pitch and is reproduced by the FEM simulations as shown in figure 3(a).…”

Section: Resultsmentioning

confidence: 78%

Phonon propagation dynamics in band-engineered one-dimensional phononic crystal waveguides

et al. 2015

View full text Add to dashboard Cite

The phonon propagation dynamics in a phononic crystal waveguide, realized via a suspended onedimensional membrane array with periodic air holes, is investigated as function of its geometry. The bandstructure of the phononic crystal waveguide can be engineered by modifying the characteristics of the phonon waves by varying the waveguide width and the pitch of the air holes. This enables the phonon transmission bands, the bandgaps, the velocity and the nonlinear dispersion in the phononic crystal to be controlled. Indeed the engineered bandstructure can even be tuned to sustain multiple phonon modes in a given branch which while being spectrally degenerate can be temporally resolved via their differing group velocities. Furthermore, the ability to tune the bandstructure and thus the nonlinear dispersion can be harnessed to efficiently activate nonlinear phenomena such as mechanical four wave mixing. This systematic study reveals the key geometric parameters that enable the phonon transport in phononic crystal waveguides to be fully controlled.

show abstract

Section: Resultsmentioning

confidence: 78%

Phonon propagation dynamics in band-engineered one-dimensional phononic crystal waveguides

et al. 2015

View full text Add to dashboard Cite

show abstract

“…There exist challenges such as fluctuations in the temperature, pressure changes, mechanical fracture, electrical short circuits and open circuit, and oxidation of the sensing element. Passive layers such as SiO2 and Si, location of the top electrode, shape of the device and the piezoelectric constant directly control the performance of a piezoelectric thin film PMUT sensor [47]. Scaling down the size of the PMUT membrane results in a reduction in not only the absolute value of the effective mass of the vibrating membrane but also its dimensions, geometry and resonance mode.…”

Section: = = (16)mentioning

confidence: 99%

“…There exist challenges such as fluctuations in the temperature, pressure changes, mechanical fracture, electrical short circuits and open circuit, and oxidation of the sensing element. Passive layers such as SiO 2 and Si, location of the top electrode, shape of the device and the piezoelectric constant directly control the performance of a piezoelectric thin film PMUT sensor [47]. A PMUT sensor can be functionalized using graphene, or any polymer where the change in mass before and after adsorption of water molecules showcases PMUT as a highly sensitive sensor to humidity [46].…”

Section: = = (16)mentioning

confidence: 99%

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Nazemi

Balasingam

Swaminathan

et al. 2020

Sensors

View full text Add to dashboard Cite

Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

show abstract

“…The major difference between the two is that the restoring force of a membrane arises entirely from the applied tension, while that of a thin plate results from the stiffness of the diaphragm [30] (p. 107). Hong et al [32] reported an in-depth study which applied membrane theory to the analysis of circular piezoelectric diaphragm vibration. Please note that this study treated the thin-film PZT and elastic passive layers as thin plates rather than membranes because in finite element studies on membranes, the thickness of membranes tends to be either not considered in meshing or meshed with only a single layer [33][34][35][36][37][38].…”

Section: Validation With Classic Plate Theorymentioning

confidence: 99%

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Kim

Liu

Jackson

et al. 2020

Sensors

View full text Add to dashboard Cite

Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3 (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays to be readily formed. This research aimed to improve the design of flexible PMUT arrays using PZFlex, a finite element method software package. A 10 MHz PMUT 2D array working in 3-1 mode was designed. A circular unit-cell was structured from the top, with concentric layers of platinum (Pt)/PZT/Pt/titanium (Ti) on a polyimide (PI) substrate. Pulse-echo and spectral response analyses predicted a center frequency of 10 MHz and bandwidth of 87% under water load and air backing. A 2D array, consisting of the 256 (16 × 16) unit-cells, was created and characterized in terms of pulse-echo and spectral responses, surface displacement profiles, crosstalk, and beam profiles. The 2D array showed: decreased bandwidth due to protracted oscillation decay and guided wave effects; mechanical focal length at 2.9 mm; 3.7 mm depth of field for -6 dB; and -55.6 dB crosstalk. Finite element-based virtual prototyping identified figures of merit—center frequency, bandwidth, depth of field, and crosstalk—that could be optimized to design robust, flexible PMUT arrays.

show abstract

Vibration of micromachined circular piezoelectric diaphragms

Cited by 73 publications

References 21 publications

Phonon propagation dynamics in band-engineered one-dimensional phononic crystal waveguides

Phonon propagation dynamics in band-engineered one-dimensional phononic crystal waveguides

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Contact Info

Product

Resources

About