1997
DOI: 10.1364/ao.36.007162
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Vibration-resistant direct-phase-detecting optical interferometers

Abstract: Two dual-beam differential direct-phase-detecting optical interferometers for scanning moving surfaces are described. Two beams from these interferometers are focused ~42 mum apart on moving surfaces, and the difference in their reflected path lengths is measured to provide the surface roughness measurement. These interferometers are exceptionally insensitive to environmental vibrations and to surface physical and chemical factors. Applications discussed include the measurement of the surface roughness of a ro… Show more

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Cited by 10 publications
(6 citation statements)
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“…Heterodyne phase detection schemes can make sensitive measurements of small or rapidly fluctuating phase change. [32][33][34] As shown in Fig. 4, one arm of the Mach-Zehnder interferometer is shifted by 40 MHz by use of an acousto-optic modulator.…”
Section: Methodsmentioning
confidence: 99%
“…Heterodyne phase detection schemes can make sensitive measurements of small or rapidly fluctuating phase change. [32][33][34] As shown in Fig. 4, one arm of the Mach-Zehnder interferometer is shifted by 40 MHz by use of an acousto-optic modulator.…”
Section: Methodsmentioning
confidence: 99%
“…Although the general strategy is to perform SWLI on a vibration-isolation table to minimize vibration, there exist unavoidable and undesirable vibrations in an uncontrollable shop floor situation with air disturbance coming from an air conditioner and machine acoustic noises as well as human voices. To resolve this critical issue, some in-situ techniques and strategies have been developed, such as active vibration isolation using a fringe locking mechanism, shortening measurement time, and performing simultaneous PSI, [199][200][201][202][203][204][205][206][207][208][209][210][211][212][213][214][215]. Early research was devoted to active feedback in laser interferometry, either by using adaptable wavelength modulation [201,[212][213][214][215] or active control of the reference arm [202][203][204][205][206][207].…”
Section: Vibration-resistant Capabilitymentioning
confidence: 99%
“…Highly dynamic variations in air density from the initial shock wave and compressible flow dynamics produce changes in the refractive index, which are observed as changes to the optical path length or as changes to the phase of the laser light. Such a heterodyne system has diverse applications, including surface metrology 4 and fluid shock wave 1,5 diagnostics. An RF mixer and LABVIEW VI decode and extract these phase shifts as a function of time.…”
Section: Phase-detecting Interferometrymentioning
confidence: 99%