“…The real part of the constant vanishes around 11.3 µm (∼885 cm −1 ), while the imaginary part is relatively small. 12,13,[24][25][26][27] Recently, various ENZ materials have drawn attention due to intriguing optical effects associated with vanishing permittivity 28 and studied for sensing, 29 enhanced fluorescence emission, 30 enhanced transmission through subwavelength apertures, 31 strong subwavelength field enhancement, 32 and engineering the frequency response of optical antennas. [33][34][35] There are various methods of AlN thin films deposition including carbothermal nitridation of Al 2 O 3 and subsequent sintering, 36,37 metalorganic chemical vapor deposition, 38 molecular beam epitaxy (MBE), 39 sputtering, 13,40 and atomic layer deposition (ALD).…”