Vibrational shape tracking of atomic force microscopy cantilevers for improved sensitivity and accuracy of nanomechanical measurements

Wagner, Ryan; Killgore, Jason P.; Tung, Ryan C.; Raman, Arvind; Hurley, Donna C.

doi:10.1088/0957-4484/26/4/045701

Cited by 22 publications

(25 citation statements)

References 26 publications

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“…54,55,56 In addition to these imaging applications, mode shape measurements have been useful for cantilever-based sensing. 57,58 To study frequency-dependent effects during PFM measurements in more detail, cantilever spectrograms -the response of the cantilever as a function of both frequency and OBD spot positionhave been measured in situ while the cantilever probes a functional material. Figure 3(a) shows a schematic diagram of the setup used to scan the spot location over the cantilever while the lever is in contact with the surface.…”

Section: Mode Mappingmentioning

confidence: 99%

In-situ piezoresponse force microscopy cantilever mode shape profiling

Proksch

2015

Journal of Applied Physics

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The frequency-dependent amplitude and phase in piezoresponse force microscopy (PFM) measurements are shown to be a consequence of the Euler-Bernoulli (EB) dynamics of atomic force microscope (AFM) cantilever beams used to make the measurements. Changes in the cantilever mode shape as a function of changes in the boundary conditions determine the sensitivity of cantilevers to forces between the tip and the sample. Conventional PFM and AFM measurements are made with the motion of the cantilever measured at one optical beam detector (OBD) spot location. A single OBD spot location provides a limited picture of the total cantilever motion and in fact, experimentally observed cantilever amplitude and phase are shown to be strongly dependent on the OBD spot position for many measurements. In this work, the commonly observed frequency dependence of PFM response is explained through experimental measurements and analytic theoretical EB modeling of the PFM response as a function of both frequency and OBD spot location on a periodically poled lithium niobate (PPLN) sample. One notable conclusion is that a common choice of OBD spot location -at or near the tip of the cantilever -is particularly vulnerable to frequency dependent amplitude and phase variations stemming from dynamics of the cantilever sensor rather than from the piezoresponse of the sample.

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Section: Mode Mappingmentioning

confidence: 99%

In-situ piezoresponse force microscopy cantilever mode shape profiling

Proksch

2015

Journal of Applied Physics

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“…Wagner et al presented the method of determination of the effective spring constant using suspended silicon microbridge feature, in terms of utilized the probes in contact resonance AFM (CR-AFM) measurements [138]. In this technique the tip oscillates in this eigenmode while it maintains in the contact with the sample.…”

Section: Calibration Structurementioning

confidence: 99%

Quantitative Normal Force Measurements by Means of Atomic Force Microscopy Towards the Accurate and Easy Spring Constant Determination

Sikora¹

2016

NSNM

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Due to its rapid popularity increase within last three decades, with particular focus on submicrometer quantitative surface's properties imaging, atomic force microscopy (AFM) is still a subject of development and research in terms of both better understanding and efficient utilization of various measurement techniques. Quantitative and comparable measurements at nanoscale are a significant issue, as both: science and industry desire reliable results, allowing to perform repetitive experiments at any time and location. Therefore a numerous analysis and research projects were carried out to provide metrological approach for those techniques in terms of providing the traceability and the uncertainty estimation. In this paper an overview of various methods and approaches towards quantitative determination of the normal spring constant of the AFM probes is presented.

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“…The basis of CR-AFM is that each resonance shifts to a higher frequency for the contact case compared with the noncontact case, which provides the necessary data to find the sample stiffness. 17,19,20 Likewise, the change in the width of the resonances can be used to find material damping. 16,18 For both types of samples, the inversion algorithm to find the properties involves a deconvolution of the probe vibration response.…”

Section: Introductionmentioning

confidence: 99%

Contact resonances of U-shaped atomic force microscope probes

Rezaei

Turner²

2016

Journal of Applied Physics

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Recent approaches used to characterize the elastic or viscoelastic properties of materials with nanoscale resolution have focused on the contact resonances of atomic force microscope (CR-AFM) probes. The experiments for these CR-AFM methods involve measurement of several contact resonances from which the resonant frequency and peak width are found. The contact resonance values are then compared with the noncontact values in order for the sample properties to be evaluated. The data analysis requires vibration models associated with the probe during contact in order for the beam response to be deconvolved from the measured spectra. To date, the majority of CR-AFM research has used rectangular probes that have a relatively simple vibration response. Recently, U-shaped AFM probes have created much interest because they allow local sample heating. However, the vibration response of these probes is much more complex such that CR-AFM is still in its infancy. In this article, a simplified analytical model of U-shaped probes is evaluated for contact resonance applications relative to a more complex finite element (FE) computational model. The tip-sample contact is modeled using three orthogonal Kelvin-Voigt elements such that the resonant frequency and peak width of each mode are functions of the contact conditions. For the purely elastic case, the frequency results of the simple model are within 8% of the FE model for the lowest six modes over a wide range of contact stiffness values. Results for the viscoelastic contact problem for which the quality factor of the lowest six modes is compared show agreement to within 13%. These results suggest that this simple model can be used effectively to evaluate CR-AFM experimental results during AFM scanning such that quantitative mapping of viscoelastic properties may be possible using U-shaped probes. V C 2016 AIP Publishing LLC.

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Vibrational shape tracking of atomic force microscopy cantilevers for improved sensitivity and accuracy of nanomechanical measurements

Cited by 22 publications

References 26 publications

In-situ piezoresponse force microscopy cantilever mode shape profiling

In-situ piezoresponse force microscopy cantilever mode shape profiling

Quantitative Normal Force Measurements by Means of Atomic Force Microscopy Towards the Accurate and Easy Spring Constant Determination

Contact resonances of U-shaped atomic force microscope probes

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