Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Bugaev, K.O.; Zelenina, Anastasia; Володин, В. А.

doi:10.1155/2012/281851

Cited by 35 publications

(15 citation statements)

References 20 publications

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“…This points out to a transformation of the amorphous Si layer on graphene into a polycrystalline film. 27 Broadening of the main Si band (FWHM at RT and 700°C of 3.8 cm -1 and 5.4 cm -1…”

mentioning

confidence: 99%

Plasma-enhanced chemical vapor deposition of amorphous Si on graphene

Łupina

Strobel

Dąbrowski

et al. 2016

Applied Physics Letters

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Plasma-enhanced chemical vapor deposition of thin a-Si:H layers on transferred large area graphene is investigated. Radio frequency (RF, 13.56 MHz) and very high frequency (VHF, 140 MHz) plasma processes are compared. Both methods provide conformal coating of graphene with Si layers as thin as 20 nm without any additional seed layer. The RF plasma process results in amorphization of the graphene layer. In contrast, the VHF process keeps the high crystalline quality of the graphene layer almost intact. Correlation analysis of Raman 2D and G band positions indicates that Si deposition induces reduction of the initial doping in graphene and an increase of compressive strain. Upon rapid thermal annealing the amorphous Si layer undergoes dehydrogenation and transformation into a polycrystalline film whereby a high crystalline quality of graphene is preserved.Ability to deposit uniform thin layers of insulators and semiconductors on graphene is of crucial importance for many envisioned applications of this material in advanced electronic and photonic devices.1 Si-graphene junctions are particularly interesting for graphene-based photodetectors, sensors, and high-frequency vertical heterojunction transistors.

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“…This points out to a transformation of the amorphous Si layer on graphene into a polycrystalline film. 27 Broadening of the main Si band (FWHM at RT and 700°C of 3.8 cm -1 and 5.4 cm -1…”

mentioning

confidence: 99%

Plasma-enhanced chemical vapor deposition of amorphous Si on graphene

Łupina

Strobel

Dąbrowski

et al. 2016

Applied Physics Letters

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“…S-GST-PSGL-1 formed on the Au nanoporous substrates via the PTS reaction. An anionic sulfate is assigned to the asymmetric SO 4 2− and -SO 3 stretching modes at 984, 1030, and 1192 cm −1 , confirming GST-PSGL-1 modification via the PTS Coatings 2020, 10, 403 9 of 14 reaction [27,47]. After the PTS reaction, the observed C=C and O-C=O peaks shifted to 1593 and 1627 cm −1 , as shown in Figure 5d,e, respectively, indicating the presence of a protein.…”

Section: Chemisorption Of Protein-immobilized Plasmonic Au Nanoporousmentioning

confidence: 66%

“…S-GST-PSGL-1 formed on the Au nanoporous substrates via the PTS reaction. An anionic sulfate is assigned to the asymmetric SO4 2− and -SO3 stretching modes at 984, 1030, and 1192 cm −1 , confirming GST-PSGL-1 modification via the PTS reaction [27,47]. After the PTS reaction, the observed C=C and O-C=O peaks shifted to 1593 and 1627 cm −1 , as shown in Figure 5d,e, respectively, indicating the presence of The SERS spectrum of the APTES-modified Au nanoporous substrate shows the O-C=O stretching mode at 1601 cm −1 , which is correlated to impurities in the ATPES solution, as shown in Figure 5b.…”

Section: Chemisorption Of Protein-immobilized Plasmonic Au Nanoporousmentioning

confidence: 69%

“…Interactions on the Plasmonic Au Nanoporous Substrate Figure 6 shows a SERS spectrum of the GST-PSGL-1 mutant's immobilization on an Au nanoporous substrate obtained at a Raman laser wavelength of 633 nm. The SERS band positions were significantly changed due to the various GST-PSGL-1 mutants; these peaks are assigned to proteins, amides, and lipids, as listed in Table S3 [25,26,[47][48][49][50]. The tyrosine residue positions 46, 48, and 51 of GST-PSGL-1 were positions mutated to phenylalanine (F).…”

Section: Protein-proteinmentioning

confidence: 99%

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Mutated Human P-Selectin Glycoprotein Ligand-1 and Viral Protein-1 of Enterovirus 71 Interactions on Au Nanoplasmonic Substrate for Specific Recognition by Surface-Enhanced Raman Spectroscopy

et al. 2020

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Protein tyrosine sulfation is a common post-translational modification that stimulates intercellular or extracellular protein-protein interactions and is responsible for various important biological processes, including coagulation, inflammation, and virus infections. Recently, human P-selectin glycoprotein ligand-1 (PSGL-1) has been shown to serve as a functional receptor for enterovirus 71 (EV71). It has been proposed that the capsid viral protein VP1 of EV71 is directly involved in this specific interaction with sulfated or mutated PSGL-1. Surface-enhanced Raman spectroscopy (SERS) is used to distinguish PSGL-1 and VP1 interactions on an Au nanoporous substrate and identify specific VP1 interaction positions of tyrosine residue sites (46, 48, and 51). The three tyrosine sites in PSGL-1 were replaced by phenylalanine (F), as determined using SERS. A strong phenylalanine SERS signal was obtained in three regions of the mutated protein on the nanoporous substrate. The mutated protein positions at (51F) and (48F, 51F) produced a strong SERS peak at 1599–1666 cm−1, which could be related to a binding with the mutated protein and anti-sulfotyrosine interactions on the nanoporous substrate. A strong SERS effect of the mutated protein and VP1 interactions appeared at (48F), (51F), and (46F, 48F). In these positions, there was less interaction with VP1, as indicated by a strong phenylalanine signal from the mutated protein.

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“…Peak between 760 and 950 cm À1 is due to Si-N stretching mode. 10 The shift from standard peak position is because of the effect of neighboring atoms on frequencies of its mode. The intensity of Si-N bond peak is higher for lower SiH 4 gas flow rate, i.e., higher N 2 /SiH 4 flow rate ratio.…”

Section: Resultsmentioning

confidence: 99%

Application of SixNy:Hz (SiN) as index matching layer in a-Si:H thin film solar cells

Singh¹,

Bhattacharya²,

Singh

et al. 2013

Journal of Renewable and Sustainable Energy

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The difference in refractive indices of glass substrate and transparent conducting oxide (TCO) electrode causes optical reflection in thin film solar cells, which results in lower absorption of light for devices. An anti-reflection layer between glass and TCO is required to reduce the loss of light due to optical reflection. Silicon nitride (SixNy:Hz) films have shown antireflection property. The refractive index of SixNy:Hz films can be engineered by changing the silicon or nitrogen content in the film. Here, we report the optimization of refractive index of SixNy:Hz to achieve a value between refractive index of glass (1.5) and TCO film (2.0). SixNy:Hz films have been deposited in a RF-plasma enhanced chemical vapour deposition system operating at a frequency of 13.56 MHz. The substrate temperature was fixed at 300 °C. Fourier transform infrared analysis has been used to determine the nature of Si-N, N-H, and Si-H bonding in the films. Refractive index of films has been measured using spectroscopic ellipsometer. The optical reflectance and transmission of SixNy:Hz and SixNy:Hz/TCO layers have been measured using UV/VIS spectrometer. The gas flow rate ratio of N2/SiH4 has been varied from 235 to 470. Decrease in transmittance of SixNy:Hz/TCO layer is observed with increase in silicon concentration in the film. Refractive index of SixNy:Hz also increased with an increase of the silicon content in the films. The reflectance of TCO films has been decreased from 15% to 8% when SixNy:Hz film is incorporated between glass substrate and TCO film. An improvement of around 20% has been observed in current density of solar cells having SixNy:Hz film as refractive index matching layer with refractive index 1.83. Thus, SixNy:Hz film as refractive index matching layer can be used to improve the solar cells device efficiency.

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Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films

Cited by 35 publications

References 20 publications

Plasma-enhanced chemical vapor deposition of amorphous Si on graphene

Plasma-enhanced chemical vapor deposition of amorphous Si on graphene

Mutated Human P-Selectin Glycoprotein Ligand-1 and Viral Protein-1 of Enterovirus 71 Interactions on Au Nanoplasmonic Substrate for Specific Recognition by Surface-Enhanced Raman Spectroscopy

Application of SixNy:Hz (SiN) as index matching layer in a-Si:H thin film solar cells

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