In this paper, we describe an optical interferometer applied to 3D inspection of microcomponents.
The resulting interference fringes that are related to the deformation and surface
contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phaseshifting
algorithms. Experimental results show the feasibility of the proposed method for 3D
deformation and surface contour measurement of micro-components.