2000
DOI: 10.1134/1.1262746
|View full text |Cite
|
Sign up to set email alerts
|

Visualization of the ion projected range region in GaAs irradiated with argon ions

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
2
0

Year Published

2012
2012
2015
2015

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 5 publications
0
2
0
Order By: Relevance
“…The kinetic energy of Ar + heavy ions favors the cascade activation of the surface of semiconductors by an argon plasma. For instance, in GaAs the activation of surface chemical reactions was observed [18]; in CdZnTe, the competition of desorption and adsorp tion processes with the formation of TeO 2 took place [19]; and in CdHgTe, the activated processes were thermal heating, enhanced diffusion of interstitial mercury Hg 0 , and even the conversion of the conduc tivity type (p n) [20]. From the aforesaid it follows that the observed phe nomena in the disordered layer of the substrate may be due to both structural and chemical transformations during the treatment of the CdZnTe surface in the nonequilibrium gas plasma.…”
Section: Resultsmentioning
confidence: 98%
See 1 more Smart Citation
“…The kinetic energy of Ar + heavy ions favors the cascade activation of the surface of semiconductors by an argon plasma. For instance, in GaAs the activation of surface chemical reactions was observed [18]; in CdZnTe, the competition of desorption and adsorp tion processes with the formation of TeO 2 took place [19]; and in CdHgTe, the activated processes were thermal heating, enhanced diffusion of interstitial mercury Hg 0 , and even the conversion of the conduc tivity type (p n) [20]. From the aforesaid it follows that the observed phe nomena in the disordered layer of the substrate may be due to both structural and chemical transformations during the treatment of the CdZnTe surface in the nonequilibrium gas plasma.…”
Section: Resultsmentioning
confidence: 98%
“…The vibration modes are identified according to[17][18][19] Note: δ s , ν s and δ as , ν as are the symmetric and asymmetric bending and stretching vibrations, respectively. Modes observed in the films are marked by +.…”
mentioning
confidence: 99%