Visually Servoed 3-D Alignment of Multiple Objects with Subnanometer Precision

Kim, J.H.; Menq, Chia-Hsiang

doi:10.1109/tnano.2007.914997

Cited by 17 publications

(5 citation statements)

References 12 publications

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“…From figures 2(a) and (b), it can be discovered that the bias value only changes along its primary axis. This result agrees with the theoretical analysis from [21], where it is indicated that the coupling bias is determined by the summation of the image intensity's cross derivatives. As for the synthetic spot pattern in figure 1(a), the summation of cross derivatives is zero because of its perfect circular symmetry.…”

Section: Generation Of Bias Mapsupporting

confidence: 91%

“…Bias maps based on true subpixel image shift are generated using (25), and the results are shown in figure 2. It was reported in [21] that the 2D bias depends on the distribution of the image intensity and its derivatives. Therefore, depending on the image features in the selected ROI, the resulting 2D biases may be quite different in magnitude.…”

Section: Generation Of Bias Mapmentioning

confidence: 99%

“…Therefore, the measurement bias at each axis will only depend on the sub-pixel image shift in the corresponding axis. The primary bias of a given image pattern, as described in [21], is determined by the smoothness of the intensity distribution. As shown in figures 2(e)-(h), the magnitude of the bias associated with ROI2 is more than three times larger than that associated with ROI1 in the x-axis.…”

Section: Generation Of Bias Mapmentioning

confidence: 99%

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Cancelling bias induced by correlation coefficient interpolation for sub-pixel image registration

Cheng¹,

Menq²

2013

Meas. Sci. Technol.

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Accurate sub-pixel image registration has many applications in precision engineering and manufacturing. Due to its computational efficiency, correlation-based sub-pixel image registration is especially useful for real-time applications. This paper presents a theoretical analysis of the bias induced by correlation coefficient interpolation, when employed to achieve two-dimensional sub-pixel registration resolution. An analytical model of bias in terms of true sub-pixel image shift is first derived according to the given reference image model. It is then used to establish an accurate bias map expressed explicitly in terms of sub-pixel image shift estimated from coefficient interpolation. This bias map is readily employed to eliminate the bias error and to significantly improve measurement accuracy for real-time applications. A bias cancellation scheme was implemented and verified by means of both computer simulation and experimental results. Specifically, sub-nanometre measurement precision was experimentally demonstrated using a microscopic vision system implemented for real-time motion tracking.

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Section: Generation Of Bias Mapsupporting

confidence: 91%

Section: Generation Of Bias Mapmentioning

confidence: 99%

Section: Generation Of Bias Mapmentioning

confidence: 99%

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Cancelling bias induced by correlation coefficient interpolation for sub-pixel image registration

Cheng¹,

Menq²

2013

Meas. Sci. Technol.

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“…The scale of the measurement sensor in all three axes has been calibrated by the single axis piezo motion stage (Polytec PI, P-753), which has a close-loop resolution of 0.05 nm. Further details on calibration and accuracy issues can be found in [29]. The interference microscope used is a Leica DMLM microscope with 20X objective lens and a Mirau interferometer.…”

Section: Resultsmentioning

confidence: 99%

Visual Servo Control Achieving Nanometer Resolution in $X$–$Y$–$Z$

Kim

Menq

2009

IEEE Trans. Robot.

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This paperpresents a three-axis vision motion sensor and its applications to visual servo control. The vision sensor is integrated with a three-axis piezo stage to form a visual servo control system that achieves nanometer resolution in all three xy-z motion axes. Motion measurement is achieved using a single interferometer-equipped optical microscope. A real-time imageprocessing algorithm that processes interference fringe patterns and that achieves nanometer out-of-plane resolution is presented. Furthermore, a feedback-control scheme is introduced to control the sensor plane using an Objective-Z-Positioner to enable automatic tracking of moving objects. It expands the out-of-plane measurement range of the vision sensor beyond its inherent depth of field of several micrometers to 100 µm and beyond. An integrated visual servo system is implemented and experimental results are shown.Index Terms-Fringe pattern, interferometry, laterally sampled white light interferometry (L-SWLI), motion measurement, optical microscope, visual servo control, white light interferometry (WLI).

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“…Sampling is always accompanied by aliasing when the spatial and/or temporal signal content varies in frequencies that exceed the Nyquist frequency [1] . In this paper, we are concerned with temporal aliasing and especially its effect on visual motion tracking [9], [10] . In motion tracking, each temporally sampled image is processed using a variety of algorithms [2]- [4] to estimate A common practice in sampling of a continuous-time signal is to filter the signal before it is passed to the sampler.…”

Section: Introduction1 )mentioning

confidence: 99%

Emulation of Anti-alias Filtering in Vision Based Motion Mmeasurement

Hyun¹

2011

The Journal of Korea Robotics Society

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This paper presents a method, Exposure Controlled Temporal Filtering (ECF), applied to visual motion tracking, that can cancel the temporal aliasing of periodic vibrations of cameras and fluctuations in illumination through the control of exposure time. We first present a theoretical analysis of the exposure induced image time integration process and how it samples sensor impingent light that is periodically fluctuating. Based on this analysis we develop a simple method to cancel high frequency vibrations that are temporally aliased onto sampled image sequences and thus to subsequent motion tracking measurements. Simulations and experiments using the 'Center of Gravity' and Normalized Cross-Correlation motion tracking methods were performed on a microscopic motion tracking system to validate the analytical predictions

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Visually Servoed 3-D Alignment of Multiple Objects with Subnanometer Precision

Cited by 17 publications

References 12 publications

Cancelling bias induced by correlation coefficient interpolation for sub-pixel image registration

Cancelling bias induced by correlation coefficient interpolation for sub-pixel image registration

Visual Servo Control Achieving Nanometer Resolution in $X$–$Y$–$Z$

Emulation of Anti-alias Filtering in Vision Based Motion Mmeasurement

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