VLSI-NEMS chip for parallel AFM data storage

Despont, M.; Brügger, J.; Drechsler, Ute; Dürig, U.; Häberle, W.; Lutwyche, M. I.; Rothuizen, H.; Stutz, R.; Widmer, R.; Binnig, G.; Rohrer, H.; Vettiger, P.

doi:10.1016/s0924-4247(99)00254-x

Cited by 140 publications

(88 citation statements)

References 9 publications

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“…An electrical and thermal simulation predicts operation of a single cantilever identical in design to the array cantilever of Despont et al 6 and is verified by electrical measurements. Figure 2 shows a scanning electron micrograph of the present cantilever.…”

Section: Atomic Force Microscope Cantilevers For Combined Thermomechamentioning

confidence: 67%

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Atomic force microscope cantilevers for combined thermomechanical data writing and reading

King

Kenny

Goodson

et al. 2001

Applied Physics Letters

169

107

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Heat conduction governs the ultimate writing and reading capabilities of a thermomechanical data storage device. This work investigates transient heat conduction in a resistively heated atomic force microscope cantilever through measurement and simulation of cantilever thermal and electrical behavior. The time required to heat a single cantilever to bit-writing temperature is near 1 μs and the thermal data reading sensitivity ΔR/R is near 1×10−4 per vertical nm. Finite-difference thermal and electrical simulation results compare well with electrical measurements during writing and reading, indicating design tradeoffs in power requirements, data writing speed, and data reading sensitivity. We present a design for a proposed cantilever that is predicted to be faster and more sensitive than the present cantilever.

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Section: Atomic Force Microscope Cantilevers For Combined Thermomechamentioning

confidence: 67%

“…4 Array operation of heater cantilevers allows higher data rates than a single cantilever configuration. We have recently fabricated a functional array of 32ϫ32 heater cantilevers 6,7 and report parallel writing and reading operation of this array in Ref. 7.…”

Section: Atomic Force Microscope Cantilevers For Combined Thermomechamentioning

confidence: 99%

Atomic force microscope cantilevers for combined thermomechanical data writing and reading

King

Kenny

Goodson

et al. 2001

Applied Physics Letters

169

107

View full text Add to dashboard Cite

show abstract

“…One concern with scanning probe lithography is the serial nature of the process and low throughput. Two approaches are in progress to address these issues: automating the nanofabrication (66-70) and͞or using parallel probes (70)(71)(72)(73). Nanostructures of SAMs are sufficiently stable, at least 40 h without observable desorption in pure solvent and 8 h without observable exchange in thiol solutions (50).…”

Section: Precise Positioning Of Small Molecules and Proteins On Surfamentioning

confidence: 99%

Positioning protein molecules on surfaces: A nanoengineering approach to supramolecular chemistry

Liu

Amro

2002

Proc. Natl. Acad. Sci. U.S.A.

183

158

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We discuss a nanoengineering approach for supramolecular chemistry and self assembly. The collective properties and biofunctionalities of molecular ensembles depend not only on individual molecular building blocks but also on organization at the molecular or nanoscopic level. Complementary to ''bottom-up'' approaches, which construct supramolecular ensembles by the design and synthesis of functionalized small molecular units or large molecular motifs, nanofabrication explores whether individual units, such as small molecular ligands, or large molecules, such as proteins, can be positioned with nanometer precision. The separation and local environment can be engineered to control subsequent intermolecular interactions. Feature sizes as small as 2 ؋ 4 nm 2 (32 alkanethiol molecules) are produced. Proteins may be aligned along a 10-nm-wide line or within two-dimensional islands of desired geometry. These high-resolution engineering and imaging studies provide new and molecular-level insight into supramolecular chemistry and self-assembly processes in bioscience that are otherwise unobtainable, e.g., the influence of size, separation, orientation, and local environment of reaction sites. This nanofabrication methodology also offers a new strategy in construction of two-and three-dimensional supramolecular structures for cell, virus, and bacterial adhesion, as well as biomaterial and biodevice engineering. S upramolecular chemistry has become an area of intense research (1-4), partly inspired by biological ensembles in nature, such as collagen and enzymes or protein assemblies in general. In nature, the collective properties and biofunctionalities of these ensembles depend not only on the individual molecular units but also (perhaps even more importantly) on the organization at the molecular or nanoscopic level (1, 2, 4, 5). Such organization dependence can be attributed to polyvalent interactions in biological systems (6). ''Bottom-up'' approaches have been taken to mimic nature and have resulted in creative synthesis of small molecular units (7,8) and large molecular motifs (9). These molecular building blocks contain the desired charge, polarization, or chemical functionalities that will affect intermolecular interactions such as van der Waals forces, hydrogen bonding, polar attractions, and͞or hydrophobic interactions (7-9). These interactions dictate the subsequent assembly into supramolecular structures (4, 9-11). Complementary to these synthetic approaches, we explore whether individual units such as small molecular ligands or large molecules such as proteins can be positioned with nanometer precision by using nanoengineering methodologies. The separation and local environment can be engineered to influence subsequent intermolecular interactions.Micrometer-sized patterns of biomolecules can be produced by using relatively well known microfabrication technologies. Without using templates, DNA micropatterns may be directly produced by using photolithography (12)(13)(14). Micropatterns of proteins have also been ...

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“…The AFM has been used to measure forces during stretching of DNA strands (4) and rupture forces of single covalent bonds (5) and can be operated in liquids, which enables its use in biological applications (6-8). The AFM also can be used to perform surface manipulations such as lithographic fabrication of a transistor (9, 10) or AFM-based data storage (11,12).Commercially available AFM instruments are rather bulky and have a low throughput because of the serial nature of the involved scanning process and the limited scanning range, which renders the investigation of larger samples rather laborious. The detection of the cantilever deflection is done mostly by means of a laser, which is costly and makes the adjustment and cantilever exchange very time consuming, in particular, when operating in a vacuum environment.…”

mentioning

confidence: 99%

mentioning

confidence: 99%

Single-chip mechatronic microsystem for surface imaging and force response studies

Hafizovic

Barrettino

Volden

et al. 2004

Proc. Natl. Acad. Sci. U.S.A.

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We report on a stand-alone single-chip (7 ؋ 10 mm) atomic force microscopy unit including a fully integrated array of cantilevers, each of which has an individual actuation, detection, and control unit so that standard atomic force microscopy operations can be performed by means of the chip only without any external controller. The system offers drastically reduced overall size and costs as well as increased scanning speed and can be fabricated with standard complementary metal oxide semiconductor technology with some subsequent micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for the controlling and monitoring of all system functions. The on-chip circuitry, which includes analog signal amplification and filtering stages with offset compensation, analog-to-digital converters, a powerful digital signal processor, and an on-chip digital interface for data transmission, notably improves the overall system performance. The microsystem characterization evidenced a vertical resolution of <1 nm and a force resolution of <1 nN as shown in the measurement results. The monolithic system represents a paradigm of a mechatronic microsystem that allows for precise and fully controlled mechanical manipulation in the nanoworld.atomic force microscopy ͉ cantilever ͉ complementary metal oxide semiconductor N ew measurement, metrology, and imaging techniques have been pivotal to the rapid development of many branches of science such as materials science, microelectronics, and microbiology, to name a few. The invention of the scanning-tunneling microscope by Binning and Rohrer in 1982 (1) and, in particular, the invention of the atomic force microscope (AFM) in 1986 (2) have established a basis for many findings in various scientific areas over the last years. The AFM has evolved at an exceptional speed from a laboratory prototype to a commercial instrument (consider, e.g., Veeco Instruments, Woodbury, NY) and many other scanning probe techniques (3) have been developed, which will not be further mentioned here. The AFM has been used to measure forces during stretching of DNA strands (4) and rupture forces of single covalent bonds (5) and can be operated in liquids, which enables its use in biological applications (6-8). The AFM also can be used to perform surface manipulations such as lithographic fabrication of a transistor (9, 10) or AFM-based data storage (11,12).Commercially available AFM instruments are rather bulky and have a low throughput because of the serial nature of the involved scanning process and the limited scanning range, which renders the investigation of larger samples rather laborious. The detection of the cantilever deflection is done mostly by means of a laser, which is costly and makes the adjustment and cantilever exchange very time consuming, in particular, when operating in a vacuum environment. To overcome these limitations, AFM probes with integrated detection schemes such as capacitive (13), piezoelectric or piezore...

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VLSI-NEMS chip for parallel AFM data storage

Cited by 140 publications

References 9 publications

Atomic force microscope cantilevers for combined thermomechanical data writing and reading

Atomic force microscope cantilevers for combined thermomechanical data writing and reading

Positioning protein molecules on surfaces: A nanoengineering approach to supramolecular chemistry

Single-chip mechatronic microsystem for surface imaging and force response studies

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